Introduction to Precision Machining Micro/Nano Structures

Ma, Yuting; Zhang, Guoqing; Cao, Shuaikang

doi:10.1007/978-981-99-1338-1_1

Fabrication of Micro/Nano Structures via Precision Machining 2023

DOI: 10.1007/978-981-99-1338-1_1

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Introduction to Precision Machining Micro/Nano Structures

Yuting Ma

Guoqing Zhang

Shuaikang Cao

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Introduction to Precision Machining Micro/Nano Structures

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References 44 publications

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