Invar-36 Micro Hemispherical Shell Resonators

Mehanathan, Nishanth; Tavassoli, Vahid; Shao, Peng; Sorenson, Logan; Ayazi, Farrokh

doi:10.1109/memsys.2014.6765568

Cited by 24 publications

(23 citation statements)

References 7 publications

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“…These values will be considered for the fabrication process of the antenna. The antenna can be fabricated using a micro-fabrication process that has recently been developed for manufacturing 3D, curved MEMS resonators [16]. The process flow developed will be modified to implement the CPW feeding structure and enable the shell to radiate as an antenna.…”

Section: Differential Modementioning

confidence: 99%

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Three‐dimensional, ultra‐wideband micromachined millimetre‐wave hemispherical shell antenna: theoretical concept and calibration

Mirbeik

Tavassoli

Ayazi

et al. 2016

IET Microwaves, Antennas & Propagation

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This study presents a theoretical design study of a novel three-dimensional micromachined hemispherical shell antenna for ultra-wideband millimetre-wave imaging applications. The antenna is composed of a hemispherical metallic shell which is suspended on top of a high-resistivity silicon substrate using a thin silicon stem. The antenna exhibits two different operational modes and an exceptionally wide bandwidth of more than 80 GHz at the centre frequency of 120 GHz. Simulation results indicate that the antenna performance is highly sensitive to geometrical variations and hence to fabrication inaccuracies. Performing a complete sensitivity analysis using full-wave simulations requires numerous simulation steps and is therefore time-intensive and impractical. This study provides closed-form solutions for all performance metrics of the antenna, followed by a comprehensive theoretical-based sensitivity analysis for evaluating the effects of fabrication imperfections on its bandwidth. The antenna structure is then calibrated for ultra-wideband operations and low sensitivities to fabrication inaccuracies.

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Section: Differential Modementioning

confidence: 99%

“…However, no fabrication platform existed until recently for this purpose. The concept of the µ‐HSA was motivated by the recent fabrication of 3D, free‐standing, curved structures in micron scales which have been used for other purposes such as micro‐electromechanical systems (MEMS) resonators [16].…”

Section: Introductionmentioning

confidence: 99%

Three‐dimensional, ultra‐wideband micromachined millimetre‐wave hemispherical shell antenna: theoretical concept and calibration

Mirbeik

Tavassoli

Ayazi

et al. 2016

IET Microwaves, Antennas & Propagation

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“…The proposed antenna is composed of a hemispherical shell suspended above a high-resistivity Silicon substrate, and can be implemented using a micro-fabrication technology originally developed for three-dimensional resonators [13]. A representative 5-μm-thick, 1600-μm-diameter MicroHemispherical Shell Antenna supported on a thin (100-μm-diameter) stem is demonstrated in Fig.…”

Section: Antenna Geometry and Characterizationmentioning

confidence: 99%

Three-dimensional super-wideband micro-antenna for high-resolution millimeter-wave medical imaging

Mirbeik

Tavassoli

Ayazi

et al. 2014

2014 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society

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This paper reports on a novel super-wideband micro-hemispherical antenna with application in millimeter-wave medical imaging. The antenna is composed of a hemispherical shell suspended above a substrate and can be fabricated using a fabrication technology originally developed for micron-scale electromechanical resonators. The antenna exhibits a wide fractional bandwidth of more than 80% (from 64 GHz to 150 GHz) and a high gain of 8.6 dBi at its center frequency. Radiation parameters of the antenna are characterized and the effect of its super-wideband behavior on pulsed millimeter-wave imaging is demonstrated. Finally, a preliminary array configuration composed of two antennas placed side-by-side in the vicinity of a skin-mimicking target is evaluated and the ability to fully detect the target has been demonstrated.

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“…An Si dioxide shell resonator is presented in [9, 10] and a polySi microhemispherical resonating gyroscope is reported in [11, 12]. The material of Invar‐36 is also used to fabricate microhemispherical shell resonator in [13]. From these studies, we can see that the main shell materials reported are metallic glass, fused Si, diamond, Si dioxide, polycrystalline Si, Invar‐36 and so on.…”

Section: Introductionmentioning

confidence: 99%

“…Eight diamond electrodes have been fabricated evenly distributed outside of the hemispherical shell, which is used for driving, sensing, tuning and full control of the resonator. Moreover, the microhemispherical shell resonators and integrated electrodes are fabricated using a self‐aligned method, which avoids the process of manual assembly [3, 13] and improves the production precision. What is more, the capacitance gaps between the resonator and the electrodes are more uniform and symmetrical in this way.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterisation of microscale hemispherical shell resonator with diamond electrodes on the Si substrate

Zhang

Cao

Tang

et al. 2019

Micro & Nano Letters

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A self-aligned fabrication method is employed for microscale hemispherical shell resonator with integrated diamond electrodes on a silicon (Si) substrate. The millimetre-scale three-dimensional (3D) hemispherical shell resonator, with integrated electrostatic excitation and capacitive detection transducers for full control of the resonator, is fabricated on the Si substrate by employing a microelectromechanical systems process. The eight integrated diamond electrodes evenly distributed outside the hemispherical shell are fabricated using a self-aligned method, which ensures uniform capacitive gap along the whole circumference. The Boron-doped polycrystalline diamond, a material with low thermo-elastic damping and low surface losses to reach the high quality, is used as the millimetre-scale 3D hemispherical shell resonator with integrated electrodes. The fabrication process enables the production of almost perfect hemisphere mould (<2% roundness variation) with an average surface roughness of 3 nm. Vibration modes and frequencies are carried out by a scanning laser Doppler vibrometer; the elliptical mode frequency is determined to be at 81.3 kHz, with the two M = 2 degenerate modes having a relative frequency mismatch of 0.86%. This process can be further optimised to fabricate high-quality and full-symmetric microscale hemispherical resonator gyroscopes in batch.

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Invar-36 Micro Hemispherical Shell Resonators

Cited by 24 publications

References 7 publications

Three‐dimensional, ultra‐wideband micromachined millimetre‐wave hemispherical shell antenna: theoretical concept and calibration

Three‐dimensional, ultra‐wideband micromachined millimetre‐wave hemispherical shell antenna: theoretical concept and calibration

Three-dimensional super-wideband micro-antenna for high-resolution millimeter-wave medical imaging

Fabrication and characterisation of microscale hemispherical shell resonator with diamond electrodes on the Si substrate

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