2007
DOI: 10.1016/j.jcrysgro.2006.10.030
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Inversion domains in AlGaN films grown on patterned sapphire substrate

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“…Defects, such as inversion domains, occasionally occur in GaN crystals grown by various techniques; for example, they are known to occur in GaN films grown by Metallorganic Chemical Vapor Deposition (MOCVD) and Hydride Vapor Phase Epitaxy (HVPE) techniques [3][4][5][6] and it is not always obvious when they are present. However, there are few publications on defects in bulk GaN crystals.…”
Section: Introductionmentioning
confidence: 99%
“…Defects, such as inversion domains, occasionally occur in GaN crystals grown by various techniques; for example, they are known to occur in GaN films grown by Metallorganic Chemical Vapor Deposition (MOCVD) and Hydride Vapor Phase Epitaxy (HVPE) techniques [3][4][5][6] and it is not always obvious when they are present. However, there are few publications on defects in bulk GaN crystals.…”
Section: Introductionmentioning
confidence: 99%