2018
DOI: 10.1149/2.0071804jss
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Inverted ‘T’ Junctionless FinFET (ITJL FinFET): Performance Estimation through Device Geometry Variation

Abstract: The work explores the performance estimation of Inverted 'T' (IT) architecture with JL topology i.e (ITJL-FinFET, the device utilizes unwanted area among multi-fins with bulk conduction mechanism) on SOI platform. For the first time, the crucial performance metrics of ITJL FinFET are debated extensively by varying the geometry dimensions at 22-nm node. The gate length (L G ), virtual underlap source (L US ) and drain (L UD ), and workfunction (φ M ) are optimized at 20-nm, 4-nm, 4.6 eV respectively. The SS, DI… Show more

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Cited by 8 publications
(1 citation statement)
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“…This work raised the use of the high-K spacer material to improve upon the drawback in the conventional DG-GS-FinFET. 13,26,27 The integration of the spacer has been a long-time challenge. However, the spacer material may help increase the convergence of the fringing field in the underlap region, improving the analog and RF performances, by overcoming problems, such as V TH pinning, mobility degradation, poor reliability, thermal budget, etc.…”
Section: Device Description and Simulation Platformmentioning
confidence: 99%
“…This work raised the use of the high-K spacer material to improve upon the drawback in the conventional DG-GS-FinFET. 13,26,27 The integration of the spacer has been a long-time challenge. However, the spacer material may help increase the convergence of the fringing field in the underlap region, improving the analog and RF performances, by overcoming problems, such as V TH pinning, mobility degradation, poor reliability, thermal budget, etc.…”
Section: Device Description and Simulation Platformmentioning
confidence: 99%