Investigating the Effect of Various Bragg’s Reflector Configurations on the Performance of Flexible FBAR Sensors

Johar, Arun Kishor; Sharma, Gaurav; Periasamy, C.; Guha, Koushik; Agarwal, Ajay; Boolchandani, Dharmendar

doi:10.1007/978-981-16-3767-4_12

Cited by 1 publication

(2 citation statements)

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“…Furthermore, FBAR possesses more favored piezoelectric properties including high acoustic velocity [258], high electromechanical coupling coefficient ( k 2 ) [259], and low acoustic loss [260]. It has been proven that bringing all these unique properties besides the ultra-thin piezoelectric films such as AIN which is in the thickness of a nanometer, all of these properties can help to produce unique FBAR devices which possess very high resonant frequencies usually from sub-GHz to 10 GHz and high-quality factor [261].…”

Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

“…Various requirements must be considered to fabricate high-quality FBAR sensors including excellent piezoelectric properties with high electromechanical coupling coefficient k 2 , perfectly organized microstructures such as off-axis orientation with a certain angle for shear mode, easy fabrication process with low cost, etc. [71,258].…”

Section: Film Bulk Acoustic Resonatormentioning

confidence: 99%

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A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

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