Investigating the effect of varying coating thickness on the surface roughness and adhesion forces of MEMS surfaces utilizing a theoretical and experimental approach

Kolahdoozan, Mojtaba; Kiani, Ali; Heidari, Pedram; Oveissi, Soheil

doi:10.1016/j.apsusc.2019.02.252

Cited by 11 publications

(7 citation statements)

References 16 publications

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“…The thickness dependence of the adhesion strength of the abovementioned deposited Au electrodes has been also observed by other reports, It could be explained as the surface roughness of film first grows and becomes stable as thickness increases, and then, the larger surface roughness causes a weaker bond strength between layers and yields a lower adhesion strength of the Au film. 26,27 As shown in Figure 3c, unlike the other two electrodes, the adhesion strength of LTSP electrodes did not show obvious thickness dependence. Here, the adhesion strength of LTSP achieves the highest value of 3.75 MPa at a thickness of 5 μm, and the averaged adhesion strength is on the order of 3.5 MPa.…”

Section: ■ Results and Discussionmentioning

confidence: 86%

Comparing Different Electrodes of Piezoelectric Single Crystal Composites for Underwater Acoustic Transducers

Jia

Wang

et al. 2022

ACS Appl. Electron. Mater.

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Electrodes are critical to piezoelectric single crystal composites (PSCCs) as they directly determine the efficiency and reliability of piezoelectric devices. Currently, a comprehensive comparison of the major properties of different electrodes on PSCCs, particularly their adhesive performance, is highly needed because the cross-linked structure and large surface-displacement fluctuations of PSCCs likely cause the peeling and failure of electrodes. Herein, we compared electronic conductivity and adhesive performance of different electrodes for PSCCs including magnetron sputtering Au (MS Au), electron beam evaporation Au (BE Au), and low-temperature silver paste (LTSP) electrodes. The results demonstrate that the LTSP electrodes exhibited the highest adhesion strength of 3.5 MPa compared to MS Au (2.1 MPa) and BE Au (0.9 MPa) electrodes on PSCCs. In addition, the adhesion strength of electrodes on PSCCs was lower than that on piezoelectric single crystals owing to the existence of the polymer phase. In terms of electrical conductivity, the LTSP electrodes displayed the highest resistivity of 2.25 × 10 −6 Ω•m, and MS Au and BE Au electrodes showed similar resistivities of 6.8 × 10 −8 and 7.6 × 10 −8 Ω•m, respectively. This work provides important information in choosing electrodes for PSCCs, thus benefiting the design for underwater acoustic transducers.

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Section: ■ Results and Discussionmentioning

confidence: 86%

Comparing Different Electrodes of Piezoelectric Single Crystal Composites for Underwater Acoustic Transducers

Jia

Wang

et al. 2022

ACS Appl. Electron. Mater.

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“…To avoid adhesion and shear forces problems arising in the contact mode [41,42], tapping mode was used for surface profiling. The average value of surface roughness [43] was used to determine the surface roughness of the layers against the given temperatures, defined by Equation (3) as…”

Section: Methodsmentioning

confidence: 99%

Prediction of Surface Roughness as a Function of Temperature for SiO2 Thin-Film in PECVD Process

et al. 2022

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An analytical model to predict the surface roughness for the plasma-enhanced chemical vapor deposition (PECVD) process over a large range of temperature values is still nonexistent. By using an existing prediction model, the surface roughness can directly be calculated instead of repeating the experimental processes, which can largely save time and resources. This research work focuses on the investigation and analytical modeling of surface roughness of SiO2 deposition using the PECVD process for almost the whole range of operating temperatures, i.e., 80 to 450 °C. The proposed model is based on experimental data of surface roughness against different temperature conditions in the PECVD process measured using atomic force microscopy (AFM). The quality of these SiO2 layers was studied against an isolation layer in a microelectromechanical system (MEMS) for light steering applications. The analytical model employs different mathematical approaches such as linear and cubic regressions over the measured values to develop a prediction model for the whole operating temperature range of the PECVD process. The proposed prediction model is validated by calculating the percent match of the analytical model with experimental data for different temperature ranges, counting the correlations and error bars.

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“…Plates and shells are the most widely used tools in industrial and manufacturing applications. With the advancement of technology, applications of these devices in various fields, especially in micro and nano scales of such as micro/nano-electromechanical systems, [1][2][3][4][5] nano-mechanical and biological sensors, [6,7] fluidic transfer devices in medical laboratories, [8,9] are indisputable. Therefore, the studies of mechanical behaviors such as bending, [10] buckling, [11] vibration, [12] and wave propagation, [13] have been highly regarded by researchers in various fields.…”

Section: Introductionmentioning

confidence: 99%

Analytical determination of non-local parameter value to investigate the axial buckling of nanoshells affected by the passing nanofluids and their velocities considering various modified cylindrical shell theories

et al. 2023

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This study deals with determining the nonlocal parameter value to achieve a more accurate axial-buckling response of carbon nanoshells conveying nanofluids, analytically. To this end, the four plates/shells' classical theories of Love, Flügge, Donnell, and Sanders are generalized using Eringen's nonlocal elasticity theory. By combining these theories in cylindrical coordinates, a modified motion equation is presented to investigate the buckling behavior of the nanofluid-nanostructure-interaction problem. Herein, in addition to the small-scale effect of the structure and the passing fluid on the critical buckling strain, the effects of nanoflow velocity, the fluid density (nano-liquid/nano-gas), half-wave numbers, aspect ratio, and the nanoshell flexural-rigidity are discussed. The analytical approach is used for discretizing and solving the obtained relations to study the mentioned cases.

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Investigating the effect of varying coating thickness on the surface roughness and adhesion forces of MEMS surfaces utilizing a theoretical and experimental approach

Cited by 11 publications

References 16 publications

Comparing Different Electrodes of Piezoelectric Single Crystal Composites for Underwater Acoustic Transducers

Comparing Different Electrodes of Piezoelectric Single Crystal Composites for Underwater Acoustic Transducers

Prediction of Surface Roughness as a Function of Temperature for SiO2 Thin-Film in PECVD Process

Analytical determination of non-local parameter value to investigate the axial buckling of nanoshells affected by the passing nanofluids and their velocities considering various modified cylindrical shell theories

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