Investigating time-resolved response of micro thermal conductivity sensor under various modes of operation

Struk, Daniel; Shirke, Amol G.; Mahdavifar, Alireza; Hesketh, Peter J.; Stetter, Joseph R.

doi:10.1016/j.snb.2017.07.142

Cited by 29 publications

(15 citation statements)

References 8 publications

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“…MEMS gas sensors based on thermal conductivity measurements [6][7][8][9] have been known to be among the promising candidates. These sensors rely on thermal energy dissipation (cooling or heating) of a heated structure due to the alteration of the surrounding gas concentration, which alleviates the requirement of large surface area and special techniques to functionalize the sensor.…”

Section: Introductionmentioning

confidence: 99%

“…These sensors are fabricated from materials with high temperature coefficient of resistance, which enables sensitive measurement of the bridge temperature by tracking the resistance. In recent studies [6,7], MEMS heated bridges have been employed to detect noble gases and demonstrated promising results for binary gas mixtures. These sensors show long lifetime and great stability compared to absorption-based gas sensors.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

Hajjaj

Jaber

Alcheikh

et al. 2019

Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- And Nanosystems

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The quest for ultra-sensitive low-cost miniaturized gas sensors in the past few decades has sparked interest to seek alternative approaches other than the conventional gas sensors that need large surface areas and special chemicals for functionalization. MEMS thermal conductivity based gas sensors [1, 2] have been shown to be among the promising candidates since they do not rely on gas absorption or chemical reactions. These sensors show long lifetime and great stability compared to conventional gas sensor. The thermal conductivity based gas sensors rely on the resistance variation of the heated structures due to gas exposure [1]. Typical values of resistance changes are less than few percent. Here, we present a thermal conductivity based gas sensor relying on frequency shifts of an electrothermally heated bridge operated near the buckling point, which leads to ultra-high sensitivity.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

Hajjaj

Jaber

Alcheikh

et al. 2019

Volume 4: 24th Design for Manufacturing and the Life Cycle Conference; 13th International Conference on Micro- And Nanosystems

View full text Add to dashboard Cite

show abstract

“…MEMS technologies have been widely applied to non-steady methods for the measurement of fluid thermal properties in recent years [ 12 , 13 , 14 ]. However, MEMS-based non-steady methods have the difficult task of arranging the sample in order to make the setup fit in their theoretical models.…”

Section: Introductionmentioning

confidence: 99%

Analytical Model and Experimental Evaluation of the Micro-Scale Thermal Property Sensor for Single-Sided Measurement

2018

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We report a new analytical model of the MEMS-based thermal property sensor for samples which are difficult to handle and susceptible to damage by thermal stimulus, such as living cells. Many sensor designs had been reported for thermal property measurements, but only a few of them have considered the analytical model of the single-sided measurement in which a measurement sample is placed on the sensor substrate. Even in the few designs that have considered the analytical model, their applicable limits are restricted to more than 1 mm length in practical situations. Our new model considers both the sample and the sensor substrate thermal properties and is applicable to a sensor length less than 1 µm. In order to minimize the influence of the heat stimulus to the sample, the model formulates the required heat dissipating time for different sensor geometries. We propose fast and precise detection circuit architecture to realize our model, and we discuss the sensor performance for a number of different designs.

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“…MEMS gas sensors based on thermal conductivity measurements [22][23][24][25][26] have been known to be among the promising alternative candidates. These sensors rely on thermal energy dissipation (cooling or heating) of a heated structure due to the alteration of the surrounding gas concentration.…”

mentioning

confidence: 99%

“…The micro-hot-plates are the most developed and investigated MEMS structures used as thermal conductivity based gas sensor [24,25,27,28]. In recent studies [22,23], MEMS heated bridges have been employed to detect noble gases and demonstrated promising results for binary gas mixtures. These sensors show long lifetime and great stability compared to absorption-based gas sensors [23,29,30].…”

mentioning

confidence: 99%

A Resonant Gas Sensor Based on Multimode Excitation of a Buckled Microbeam

et al. 2020

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We report a new gas sensing technique based on the simultaneous tracking of multiple modes of vibration of an electrothermally heated bridge resonator operated near the buckling point. The proposed technique maximizes the sensitivity of the sensor to changes in gases concentrations. We demonstrate a 200% frequency shift in contrast to 0.5% resistance change using the conventional resistive technique. The method also demonstrates selective identification for some gases without the need for surface functionalization of the microstructure. The proposed method is simple in principle and design and is promising for achieving practical low-cost gas sensors.

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Investigating time-resolved response of micro thermal conductivity sensor under various modes of operation

Cited by 29 publications

References 8 publications

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

Analytical Model and Experimental Evaluation of the Micro-Scale Thermal Property Sensor for Single-Sided Measurement

A Resonant Gas Sensor Based on Multimode Excitation of a Buckled Microbeam

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