Investigation and analysis of MEMS based capacitive sensor’s characteristics with the effect of electrode pattern

Hmingthansanga, C.; Maity, Reshmi; Dutta, Shankar; Maity, Niladri Pratap

doi:10.1007/s00542-024-05756-2

Microsyst Technol

2024

DOI: 10.1007/s00542-024-05756-2

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Investigation and analysis of MEMS based capacitive sensor’s characteristics with the effect of electrode pattern

C. Hmingthansanga,

Reshmi Maity,

Shankar Dutta

et al.

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Investigation and analysis of MEMS based capacitive sensor’s characteristics with the effect of electrode pattern

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References 58 publications

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