Investigation Into Low Frequency Response of Acoustic MEMS for Determination of Failure Modes

Hantos, Gergely; Desmulliez, Marc Phillipe Yves

doi:10.1109/tsm.2021.3065553

Cited by 2 publications

(1 citation statement)

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“…The impact of electrostatic capture was proven to have a clearly distinguishable effect on the ±3 dB points as well that allowed up to 100% separation efficiency on states of capture from no-capture ones. Using solely this information for capture detection needs to be handled with caution as there are various effects, such as lid attach holes or broken diaphragm vents that can influence the low frequency roll-off of a MEMS microphone [23].…”

Section: Discussionmentioning

confidence: 99%

On the Use of Acoustic Methods for the Detection of Electrostatic Capture of Diaphragm in Capacitive MEMS Microphones

Hantos

Simon

Desmulliez

2022

IEEE Trans. Compon., Packag. Manufact. Technol.

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Most mobile phones today have capacitive microelectromechanical systems (MEMS) microphones that use either single or dual diaphragm. Methods to detect failures easily and non-invasively have become of critical importance for microphones mobile phone manufacturers as a basis for built-in self-test (BIST) and self-repair (BISR) strategies. In that regard, a four-layer framework is presented that includes lumped element modelling (LEM), failure mode simulation, failure mode discrimination and recovery. The frequency response of the microphone is taken as the main output to analyse. To experimentally validate this framework, this article provides a failure mode induction method based on bias voltage sweeping and four new techniques, based solely on acoustic measurements to discriminate the states of electrostatic capture for single diaphragm capacitive MEMS microphones. These include a) analysis of an acoustic signature that is unique to electrostatic capture based on cosine similarity analysis, b) -3 dB point measurement, C) +3 dB point measurement, and d) cluster analysis. Measurement of pull-in voltage and snapback voltage ranges is further demonstrated based on sensitivity measurements in laboratory conditions and response magnitude and noise power measurements in non-laboratory conditions. Up to 100% success rate in detecting electrostatic capture of diaphragm is reported for this type of device.

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Section: Discussionmentioning

confidence: 99%