Abstract:Difficult-to-machining materials are widely used in industry, due to their excellent material properties. However, the ultra-precision machining of difficult-to-machining is difficulty issue, due to their properties of super hard and super brittle. Ultrasonic assisted machining has a prominent role in processing difficult materials, because it combines the advantages of traditional processing and ultrasonic vibration. In this paper, ultrasonic assisted grinding processing method was used to machining silicon c… Show more
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