Abstract:We present in this paper possibility of using glancing incidence ions scattering process for the determination of surface atomic step. We study the grazing scattering of Ne+ stepped InP(001)<ī10> surface in small angle of incidence ions. Additionally, we elaborate on the spectra of energy some intensive maximums formed by ions scattered from the monoatomic surface steps. Based on concrete examples, we also observe the effect of the atomic mass of the stepped atoms on the process of ion scattering. We stu… Show more
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