Investigation of a New High Sensitive Micro-Electromechanical Strain Gauge Sensor Based on Graphene Piezoresistivity

Gamil, Mohammed; Tabata, Osamu; Nakamura, Kōichi; El-Bab, Ahmed M. R. Fath; El‐Moneim, Ahmed Abd

doi:10.4028/www.scientific.net/kem.605.207

Cited by 42 publications

(24 citation statements)

References 8 publications

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“…Details of the fabrication and transfer processes of graphene films have been reported in our previous study. (15) To insure the quality and number of graphene layers, the deposited films were characterized by optical microscopy (Keyence, VHX-1000), SEM (JEOL, JSM-6010LV), AFM (Bruker AFM), and Raman spectroscopy (Lambda Solutions, Dimension-P1).…”

Section: Graphene Preparation and Characterizationmentioning

confidence: 99%

“…Recently, graphene has been presented as a potential piezoresistive material that can withstand a large strain and is stable up to a temperature of 700 °C, aside from having a very high carrier mobility. (3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17)(18) Moreover, graphene is compatible with the wafer level owing to its two-dimensional architecture, suggesting that the material could be a promising template for novel microfabrication processes.…”

Section: Introductionmentioning

confidence: 99%

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Ultrahigh-sensitivity Graphene-based Strain Gauge Sensor: Fabrication on Si/SiO2 and First-principles Simulation

Gamil¹,

El-Bab²,

El‐Moneim³

et al. 2018

Sensors and Materials

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Monolayer and multilayer graphene films have been grown on a Cu substrate by chemical vapor deposition (CVD) and then transferred onto a SiO 2 /Si substrate using polymethyl methacrylate (PMMA) to fabricate an ultrasensitive graphene-based strain gauge sensor. The graphene films were patterned using a CO 2 laser beam. The sensitivity and temperature dependence of the gauge factor (GF) of the fabricated sensors were examined at different applied strains and operating temperatures up to 0.05% and 75 °C, respectively. The fabricated gauges based on monolayer and multilayer graphene films show stable GFs of 255 and 104 within the applied temperature range, respectively. The patterning technique provides an interesting, lowcost, fast, and high-throughput process to realize scalable microfabrication for highly sensitive strain sensors with good temperature stability based on graphene piezoresistivity. A theoretical simulation of the GF of monolayer graphene has also been carried out on the basis of firstprinciples calculation. Simulation results follow the measured GFs in our experiment and other references. *. The data are averaged for all angles (0° ≤ θ < 360°).

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Section: Graphene Preparation and Characterizationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Ultrahigh-sensitivity Graphene-based Strain Gauge Sensor: Fabrication on Si/SiO2 and First-principles Simulation

Gamil¹,

El-Bab²,

El‐Moneim³

et al. 2018

Sensors and Materials

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“…On the other hand, Fu et al (2011) measured a GF of 151 for monolayer graphene prepared by CVD and then transferred to polydimethylsiloxane (PDMS) substrate. In a similar research (Gamil et al, 2014a(Gamil et al, , 2014b, a higher GF of 255 was measured for monolayer graphene film grown by CVD on a copper foil and then transferred to Si/SiO 2 substrate. Furthermore, many investigations have been conducted to increase the sensitivity of graphene-based strain sensors using various techniques which depend on different structures and mechanisms such as structure deformation (Jin et al, 2009;Yu et al, 2008aYu et al, , 2008b, overlapped graphene sheets (Hempel et al, 2012;Kim et al, 2011) and tunneling effect between neighboring graphene islands (Zhao et al, 2012).…”

Section: Introductionmentioning

confidence: 98%

Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors

Sayed

Gamil

El-Bab

et al. 2016

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Purpose The purpose of this paper is to develop a new simple technique to synthesize graphene film on a flexible polyethylene terephthalate (PET) substrate and applied as a strain sensor. Design/methodology/approach Graphene film was synthesized using laser treatment of graphene oxide (GO) film deposited on PET substrate. A universal laser system was used to simultaneously reduce and pattern the GO film into laser reduced graphene oxide (LRGO) film. Findings The laser treatment synthesizes a multilayer graphene film with overlapped flakes, which shows structure integrity, mechanical flexibility and electrical conductivity of 1,330 S/m. The developed LRGO/PET film was used to fabricate a high sensitivity strain sensor. The sensitivity and temperature dependency of its gauge factor (GF) was examined at applied strains up to 0.25 per cent and operating temperatures up to 80°C. The fabricated sensor shows stable GF of approximately 78 up to 60°C with standard error of the mean not exceeding approximately ± 0.2. Originality/value The proposed method offers a new simple and productive technique of fabricating large-scale graphene-based flexible devices at a low cost.

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“…The electronic band structure of graphene is shifted by its in‐plane elastic strain, which causes attractive changes in the electrical properties under structural deformation . Uniform nanographene films obtained by chemical vapor deposition have been reported to exhibit a gauge factor of over 250, whereas the maximum strain was found to be less than 0.4% . To achieve force sensors with a high stress sensitivity and a large strain range, macroscopic 3D monoliths of these nanomaterials with high porosity and compressibility have been developed .…”

Section: Introductionmentioning

confidence: 99%

Electrical Breakdown‐Induced Tunable Piezoresistivity in Graphene/Polyimide Nanocomposites for Flexible Force Sensor Applications

Jiang

Xing

et al. 2018

Adv Materials Technologies

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nanomaterials with excellent electrical properties have been used in flexible piezoresistive force sensors, such as graphene, carbon nanotube (CNT), and graphite nanoplatelets. The electronic band structure of graphene is shifted by its in-plane elastic strain, which causes attractive changes in the electrical properties under structural deformation. [10] Uniform nanographene films obtained by chemical vapor deposition have been reported to exhibit a gauge factor of over 250, whereas the maximum strain was found to be less than 0.4%. [11,12] To achieve force sensors with a high stress sensitivity and a large strain range, macroscopic 3D monoliths of these nanomaterials with high porosity and compressibility have been developed. [13][14][15][16][17] Lv et al. demonstrated a simple sparkling strategy to produce ultralight graphene blocks. [15] Kim et al. transformed an inelastic CNT aerogel into a superelastic material by coating it with graphene nanoplatelets. [16,17] The above-mentioned 3D monoliths exhibit good electrical conductivity and high compressive strain ranges. However, the sparkling approach generates air bubbles with a size of 100-300 µm, forming a macroporous framework. The coating of CNT aerogel with graphene nanoplatelets involves the conversion of polyacrylonitrile into graphene at 1010 °C with the shrinkage of CNT aerogels. The fabrication of monoliths using the above-mentioned strategies has many challenges such as high temperatures and dimension shrinkage in microfabrication. These monoliths are all fabricated on the macroscale and face many challenges in microfabrication.Electrically conductive nanocomposites comprising carbonbased nanomaterials and insulating polymer matrices have been used in force sensors because of their excellent stretchability, low cost, and facile process of fabrication. [18][19][20][21] Owing to the universality of this technique and diverse mechanical properties of different polymers, the obtained conductive nanocomposites exhibit a wide range of elastic moduli. The dependence of electrical resistivity on force can be adjusted by changing the nanomaterial concentration. [22,23] To achieve a high sensitivity in the low-stress regime, porous structures and microdome/pyramid arrays have been developed. [24][25][26][27][28][29][30][31] Lee et al. fabricated an ultrasensitive pressure sensor by an electrospinning process, [30] and Park et al. demonstrated the detection of Flexible force sensors based on graphene/polymer nanocomposites have attracted tremendous attention owing to their remarkable sensitivity and ease of fabrication. In the present study, nanocomposites consisting of graphene as conducting fillers in a polyimide matrix are prepared, and an electrical breakdown method is used to endow the nanocomposite with a high piezoresistivity. Electromechanical tests and theoretical models confirm that the piezoresistivity of the nanocomposite originates from the cracks in the carbonized polymers induced by electrical breakdown. The fabricated force sensor exhibits a bro...

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Investigation of a New High Sensitive Micro-Electromechanical Strain Gauge Sensor Based on Graphene Piezoresistivity

Cited by 42 publications

References 8 publications

Ultrahigh-sensitivity Graphene-based Strain Gauge Sensor: Fabrication on Si/SiO2 and First-principles Simulation

Ultrahigh-sensitivity Graphene-based Strain Gauge Sensor: Fabrication on Si/SiO2 and First-principles Simulation

Graphene film development on flexible substrate using a new technique: temperature dependency of gauge factor for graphene-based strain sensors

Electrical Breakdown‐Induced Tunable Piezoresistivity in Graphene/Polyimide Nanocomposites for Flexible Force Sensor Applications

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