Investigation of a set procedure for the stability of pressure control in the newly developed flow-control system at KRISS

Abstract

Korea Research Institute of Standards and Science (KRISS) has assembled a new flow-control system for the study of advanced applications and calibration of different types of vacuum gauges by comparison method. This report details the measurement of the outgassing rate of the main vacuum chamber by the pressure rate of rise method. Constant pressure was generated inside the vacuum chamber by employing a dynamic flow control method. Nitrogen gas flow data was recorded to demonstrate that constant pressure was controlled in the vacuum chamber. The measurements were performed in a sequence of increasing pressures.

An Overview of Low Vacuum System for the Pressure Range from 1 Pa to 133 Pa

“…The outgassing rate of a main chamber was measured by using the pressure rise method 4) . Figure 2 shows the time dependence of the pressure change in main vacuum chamber after closing the gate valve.…”