2003
DOI: 10.1063/1.1590054
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Investigation of a steady-state cylindrical magnetron discharge for plasma immersion treatment

Abstract: Ion current distribution in a system with crossed magnetic and electrical fields for plasma immersion ion implantation has been investigated. It is found that the ion current to a target has a nonmonotonic behavior with bias voltage when a magnetic field is applied. For instance, the current density has a maximum of about 150 A/m 2 at bias voltage of about 1 kV in the case of a magnetic field parallel to the target of about 0.035 T. These results are explained in terms of ionization by magnetized electrons in … Show more

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Cited by 43 publications
(25 citation statements)
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“…The metamaterial characteristics were calculated using the model based on Richardson-Dushman equation for thermionic emission current, Child-Langmuir relation for electron current density in vacuum between the two electrodes, [ 44 ] and a set of energy balance equations (detailed description of the model used for simulations can be found in the Supporting Information). For the certainty, we have selected three typical cathode materials being widely used in the thermionic electron emitters: cesium (Cs, work function ϕ wL = 1.81 eV) which could be considered as low-temperature emissive material; Cs/O/W composition (work function ϕ wL = 0.72 eV) capable of working at medium temperatures, and high-temperature LaB 6 material (work function ϕ wL = 2.66 eV).…”
Section: Modelmentioning
confidence: 99%
“…The metamaterial characteristics were calculated using the model based on Richardson-Dushman equation for thermionic emission current, Child-Langmuir relation for electron current density in vacuum between the two electrodes, [ 44 ] and a set of energy balance equations (detailed description of the model used for simulations can be found in the Supporting Information). For the certainty, we have selected three typical cathode materials being widely used in the thermionic electron emitters: cesium (Cs, work function ϕ wL = 1.81 eV) which could be considered as low-temperature emissive material; Cs/O/W composition (work function ϕ wL = 0.72 eV) capable of working at medium temperatures, and high-temperature LaB 6 material (work function ϕ wL = 2.66 eV).…”
Section: Modelmentioning
confidence: 99%
“…The gaps between nanowires did not exceed several hundred nanometers, thus less than the common enzyme-producing bacteria. 72,[82][83][84][85][86] In the case of silver nanowires on alumina, the two different kinds of plasma systems can be used. The further tests have demonstrated that the plasma-treated nanowires (without any chemical treatment) are able to trap proteins.…”
Section: B Treatment Of Inorganic Nanostructures For Biomedical and mentioning
confidence: 99%
“…The most popular modern methods for nanotube synthesis include a range of plasma-based techniques, such as the plasma-enhanced chemical vapor deposition ͑PECVD͒, [11][12][13] ionized physical vapor deposition ͑i-PVD͒, 14,15 as well as various arc discharge-based approaches. 16 Some features of the plasma-based methods for the production of vertically aligned nanostructures on solid surfaces have already been reported.…”
Section: Introductionmentioning
confidence: 99%