Investigation of an interlaced laser beam scanning method for ultrashort pulse laser micromachining applications

Wlodarczyk, Krystian Lukasz; Schille, Joerg; Naumann, Lucas; Lopes, Amiel A.; Bitharas, Ioannis; Bidare, Prveen; Dondieu, Stephen; Blair, P.; Loeschner, Udo; Moore, Andrew J.; Maroto‐Valer, M. Mercedes; Hand, Duncan Paul

doi:10.1016/j.jmatprotec.2020.116807

Cited by 11 publications

(4 citation statements)

References 11 publications

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“…However, residual energy, not removed by ablation products, heats the target [91]. Ramping the scanning speed with polygons and utilizing the interlaced mode facilitate temporal and spatial separation between laser pulses and prevent the target from heating to melting temperature [93], [99]. Lasers with a power of 100 W at tens of MHz could be used for high-quality ablation at a 100 m/s scanning speed.…”

Section: A High-throughput and Precision Ablation Of Metalsmentioning

confidence: 99%

Ultra-Short Pulse Lasers for Microfabrication: A Review

Račiukaitis

2021

IEEE J. Select. Topics Quantum Electron.

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Ultra-short pulse lasers, generating coherent light pulses with pulse durations in the picosecond and femtosecond range, are becoming popular in precision laser microfabrication. They are benefiting not only from well-predicted laser ablation with the suppressed heat-affected zone but also by opening new processing opportunities, especially in transparent materials, due to enhanced non-linear interaction with the material. In this review, the evolution of various kinds of mode-locked lasers from a scientific toy to a robust industrial tool is reviewed. The utilization benefits of high-average-power, high-pulse-repetition-rate ultra-short pulse laser are closely related to beam shaping and manipulation techniques. Fast beam scanning with galvanometric and polygon scanners as well as multi-beam parallel processing methods were developed. Some hot applications areas are briefly described. The efficient use of photons from ultra-short pulse lasers pushed the development of optimization methods in the ablation process. Efforts toward upscaling the process by increasing the average power of mode-locked lasers made feedback to laser developers, and burst regime became a necessity as well as high-speed beam scanning devices. Unique opportunities of ultra-short pulses are successfully exploited in machining transparent materials, with glass separation being the leading application.

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Section: A High-throughput and Precision Ablation Of Metalsmentioning

confidence: 99%

Ultra-Short Pulse Lasers for Microfabrication: A Review

Račiukaitis

2021

IEEE J. Select. Topics Quantum Electron.

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“…Figure 9 shows the resulting ablation depth and the corresponding roughness for the interlayer rotation for 0

, 11

and 90

, while the rotation by 11

per layer had no influence on the ablation depth, the rotation by 90

led to a depth increase by approximately 13%. The influence of both, the orientation [ 34 ] and the order [ 35 ] of the laser scan path has been previously studied for several processes and materials, with a recommendation to rotate the angle between consecutive layers to improve process performance [ 36 , 37 , 38 , 39 ].…”

Section: Resultsmentioning

confidence: 99%

Micromachining of Alumina Using a High-Power Ultrashort-Pulsed Laser

2022

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We report on a comprehensive study of laser ablation and micromachining of alumina using a high-power 1030 nm ultrashort-pulsed laser. By varying laser power up to 150 W, pulse duration between 900 fs and 10 ps, repetition rates between 200 kHz and 800 kHz), spatial pulse overlap between 70% and 80% and a layer-wise rotation of the scan direction, the ablation efficiency, ablation rate and surface roughness are determined and discussed with respect to an efficient and optimized process strategy. As a result, the combination of a high pulse repetition rate of 800 kHz and the longest evaluated pulse duration of 10 ps leads to the highest ablation efficiency of 0.76 mm3/(W*min). However, the highest ablation rate of up to 57 mm3/min is achieved at a smaller repetition rate of 200 kHz and the shortest evaluated pulse duration of 900 fs. The surface roughness is predominantly affected by the applied laser fluence. The application of a high repetition rate leads to a small surface roughness Ra below 2 μm even for the usage of 150 W laser power. By an interlayer rotation of the scan path, optimization of the ablation characteristics can be achieved, while an interlayer rotation of 90° leads to increasing the ablation rate, the application of a rotation angle of 11° minimizes the surface roughness. The evaluation by scanning electron microscopy shows the formation of thin melt films on the surface but also reveals a minimized heat affected zone for the in-depth modification. Overall, the results of this study pave the way for high-power ultrashort-pulsed lasers to efficient, high-quality micromachining of ceramics.

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“…The burst overlap ratio (BOR) was fixed at 0.9 and the overlap ratio between scanning lines was fixed with a hatch distance of 5 μm. During laser scanning, an interlaced scanning strategy [19] was utilized to improve the surface quality by extending the surface cooling time between scanning lines. Sky-writing was carried out to ensure a constant scan speed in the processed area.…”

Section: Methodsmentioning

confidence: 99%

Ultrashort pulsed laser ablation of stainless steel with MHz bursts

Jia,

Jansma,

Zhang

et al. 2024

Laser-Based Micro- And Nanoprocessing XVIII

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This study investigates the ablation process of stainless steels using ultrashort pulsed laser bursts with a MHz intra-burst repetition rate. Primary laser parameters, including pulse fluence and pulse number per burst, are varied to study their influences on the ablation process. Laser ablation in single-pulse and burst modes are compared in terms of ablation efficiency and surface quality. It is found that burst-mode ablation can generate much better surface quality than singlepulse ablation, despite slightly reduced ablation efficiency. Different types of surface structures can be generated by the ablation process and their formation mechanisms are analyzed. This work highlights the advantage of burst-mode ablation in achieving ultra-smooth surfaces on stainless steel and unveils the optimization strategy for machining highquality surfaces while maintaining high ablation efficiency.

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Investigation of an interlaced laser beam scanning method for ultrashort pulse laser micromachining applications

Cited by 11 publications

References 11 publications

Ultra-Short Pulse Lasers for Microfabrication: A Review

Ultra-Short Pulse Lasers for Microfabrication: A Review

Micromachining of Alumina Using a High-Power Ultrashort-Pulsed Laser

Ultrashort pulsed laser ablation of stainless steel with MHz bursts

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