Investigation of barium evaporation and diffusion in fluorescent lamps

Rackow, K.; Lieberer, Markus

doi:10.1109/plasma.2009.5227674

Cited by 1 publication

(1 citation statement)

References 0 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…This also ensures that the influence of the coaxial cable used is negligible. The relative phase difference is measured using the blanking method [17], where the plasma is turned off periodically to measure the phase shift caused by free space propagation. Using this method reduces errors caused by changes in the geometrical dimensions of the experiment (e.g.…”

Section: Microwave Interferometermentioning

confidence: 99%

Electron density measurements on an inductively coupled plasma with a one-port microwave interferometer

Andrasch

Ehlbeck

Foest

et al. 2012

Plasma Sources Sci. Technol.

View full text Add to dashboard Cite

A one-port microwave interferometer has been employed to measure the electron density in a conventional reactor for plasma-enhanced chemical vapour deposition (PECVD). As opposed to standard two-port configurations, which require two accessible viewports in the reactor, this setup uses only one port and is therefore readily coupled to standard industrial vacuum equipment. The interferometer works at 45.75 GHz and separates forwarded and reflected waves. A microwave mirror is positioned at the reactor wall opposite the viewing port. The capability of the method is demonstrated on the basis of exemplary measurements in an inductively coupled plasma (ICP, 13.56 MHz) suitable for PECVD. Line-integrated electron densities are measured for different conditions (Ar, p = 0.1-1 Pa, P rf = 30-1000 W). Langmuir probe measurements provide radial profiles of the electron density and are used as a comparative reference. These profiles are fitted with Bessel functions and serve as the basis for the interpretation of the interferometric data in terms of peak density, where the amplitude of these generic profiles is used as the free parameter. The densities obtained are in good agreement with the Langmuir probe results. Maximum values 1 × 10 18 m −3 are obtained in the centre of the vessel at an axial distance of 0.24 m from the antenna window of the ICP source.

show abstract

Section: Microwave Interferometermentioning

confidence: 99%