2013
DOI: 10.1002/sia.5353
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Investigation of block depth distribution in PS-b-PMMA block copolymer using ultra-low-energy cesium sputtering in ToF-SIMS

Abstract: Directed self-assembly of block copolymers (BCPs) is a promising candidate for next generation nanolithography. In order to validate a given pattern, the lateral and in-depth distributions of the blocks should be well characterized; for the latter, time-of-flight (ToF) SIMS is a particularly well-adapted technique. Here, we use an ION-TOF ToF-SIMS V in negative mode to provide qualitative information on the in-depth organization of polystyrene-b-polymethylmethacrylate (PS-b-PMMA) BCP thin films. Using low-ener… Show more

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Cited by 17 publications
(15 citation statements)
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“…[50][51][52][53][54][55][56][57] In these sources, argon gas clusters are formed as Ar atoms coalesce following a supersonic expansion, resulting in clusters with a tuneable cluster size in the range of a few 1000 atoms/cluster and several eV per atom. 58 Originally employed in SIMS depth profiling, GCIB sources have already found application in combination with XPS, 59,60 however only a handful of reports exist of their combination with UPS. Specifically, a comparison of UPS surface measurements performed using the 'layer by layer' method with UPS depth profiling using GCIB confirmed an essentially damage-free removal of thermally evaporated organic molecules.…”
Section: Introductionmentioning
confidence: 99%
“…[50][51][52][53][54][55][56][57] In these sources, argon gas clusters are formed as Ar atoms coalesce following a supersonic expansion, resulting in clusters with a tuneable cluster size in the range of a few 1000 atoms/cluster and several eV per atom. 58 Originally employed in SIMS depth profiling, GCIB sources have already found application in combination with XPS, 59,60 however only a handful of reports exist of their combination with UPS. Specifically, a comparison of UPS surface measurements performed using the 'layer by layer' method with UPS depth profiling using GCIB confirmed an essentially damage-free removal of thermally evaporated organic molecules.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, there is an increasing need for metrology to provide an accurate chemical characterization with 3D spatial resolution at the nanoscale. Providing such a high 3D spatial resolution is a challenging task and it has been the topic of many studies so far …”
Section: Introductionmentioning
confidence: 99%
“…Cs high reactivity ensures a negative ion signal enhancement, along with free radicals scavenging [18]. This source already proved its efficiency on both inorganics [19][20][21][22] and organics [23][24][25]. In this paper, we analyze model systems made of different metals (gold or chromium) and tyrosine multilayer systems deposited on silicon substrates.…”
Section: Introductionmentioning
confidence: 99%