Investigation of chromium contamination induced TDDB degradation in MOSFET

Hsiao, C. H.; Teng, A.; Chang, Wen Teng; Chen, Yi-Yueh; Lee, Ming-Yi; Tsai, Yuan-Shan; Lee, Ta-Wei; Lin, D.-G.; Dai, Allen; Lu, Chih‐Yuan

doi:10.1109/ipfa.2013.6599127

Proceedings of the 20th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2013

DOI: 10.1109/ipfa.2013.6599127

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Investigation of chromium contamination induced TDDB degradation in MOSFET

C. H. Hsiao

A. Teng

Wen Teng Chang

et al.

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Cited by 2 publications

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“…7 Additionally, Cr contamination results in reliability degradation of the gate dielectric. 8 Furthermore, the presence of these metal ions impacts the gate oxide quality of ICs. 9 Therefore, the maximum concentration of these metallic impurities in the processing liquid should be maintained at sub ppb levels.…”

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confidence: 99%

Metal Ions Removal from Organic Solvents using MXene-Based Membranes

Gnani Peer Mohamed,

Arabi Shamsabadi,

Kavousi

et al. 2023

ACS Appl. Eng. Mater.

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We investigated the applicability of membranes, prepared with Ti 3 C 2 T x MXene as the active layer, for metal ion removal from an organic solvent. The removal of various mixed metal ions from propylene glycol monomethyl ether acetate, commonly used in the microelectronics industry, was evaluated. The MXene membrane exhibited over 90% removal efficiency for metal ions such as Li, Ca, Cr, Fe, Ni, and Co and over 80% for metal ions such as Al, V, and Pb from a solution containing 17 metal ions. This result highlights the potential of MXene as an effective material for ion removal from organic solvents.

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confidence: 99%

Metal Ions Removal from Organic Solvents using MXene-Based Membranes

Gnani Peer Mohamed,

Arabi Shamsabadi,

Kavousi

et al. 2023

ACS Appl. Eng. Mater.

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Removal of trace Na and K metal ions by resin-grafted crown ether for electronic-grade N-methyl pyrrolidone purification

Chang,

Guo,

Yang

et al. 2025

Separation and Purification Technology

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Investigation of chromium contamination induced TDDB degradation in MOSFET

Cited by 2 publications

References 8 publications

Metal Ions Removal from Organic Solvents using MXene-Based Membranes

Metal Ions Removal from Organic Solvents using MXene-Based Membranes

Removal of trace Na and K metal ions by resin-grafted crown ether for electronic-grade N-methyl pyrrolidone purification

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