2014
DOI: 10.1063/1.4900554
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Investigation of deformations and strain fields in silicon matrix structures embedded with vertically stacked Ge(Si) self-assembled islands

Abstract: Elastic strains have been measured quantitatively and clearly demonstrated, resulting in vertical stacking of Ge(Si) self-assembled islands in a silicon matrix using the geometric phase analysis method. The strains are calculated on the basis of the data on the elemental composition and crystal-lattice distortions. An empirical approach on the basis of the experiment has allowed the determination of geometric phase method in accuracy.

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Cited by 9 publications
(2 citation statements)
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“…The fast Fourier transform (FFT) pattern of the local region and the inverse FFT image were used to achieve a geometric phase analysis (GPA) of the local lattice strains. 34,35 Local strain maps e xx and e yy are shown in the right in Fig. 2(a), where, x and y directions are defined along [001] and [100], and the same analysis of the BFO film is shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The fast Fourier transform (FFT) pattern of the local region and the inverse FFT image were used to achieve a geometric phase analysis (GPA) of the local lattice strains. 34,35 Local strain maps e xx and e yy are shown in the right in Fig. 2(a), where, x and y directions are defined along [001] and [100], and the same analysis of the BFO film is shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…The inverse Fast Fourier Transform (FFT) pattern of the nanocrystalline region delineated with the yellow box in Figure 2e is shown in Figure 2f, which was selected to conduct a detailed geometric phase analysis (GPA) of the local lattice strains. [33,34] The maps of the local strain fields (e yy and e xx ) are shown in the left image of Figure 2g,h, where x and y directions are defined along [100] and [001], respectively. It can be observed that there are nanoscale alternating distortion regions of compressive and tensile strains in e yy and e xx maps.…”
Section: Resultsmentioning
confidence: 99%