“…This positive species passes back through the oxide, but is first incident on the nitrogen rich area of the layer. The generation of traps is somehow suppressed due to the incorporation of nitrogen at the interface in agreement with previous studies [8,9], and so we see only a slight V t shift at high Q inj . When substrate injection is used to stress the oxide, the same process leads to the positive species being released into the less nitrided region and so traps are created more quickly, leading to a substantial V t shift, even at low Q inj .…”