2022
DOI: 10.1016/j.sab.2022.106457
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Investigation of emission lines for in-situ elemental analysis of Cu–Zn films deposited by sputtering

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Cited by 7 publications
(4 citation statements)
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“…During the sputtering deposition, argon gas (purity: 99.9999%) with a ow rate of 20 mL min − 1 was introduced into the chamber using a mass ow controller, and the gate value was positioned to obtain a chamber pressure of 1 Pa. The thickness of the Cr 2 O 3 lm was monitored during the sputter deposition using a quartz crystal microbalance monitor (STM-2, INFICON Co. Ltd., Bad Ragaz, Switzerland) [25].…”
Section: Methodsmentioning
confidence: 99%
“…During the sputtering deposition, argon gas (purity: 99.9999%) with a ow rate of 20 mL min − 1 was introduced into the chamber using a mass ow controller, and the gate value was positioned to obtain a chamber pressure of 1 Pa. The thickness of the Cr 2 O 3 lm was monitored during the sputter deposition using a quartz crystal microbalance monitor (STM-2, INFICON Co. Ltd., Bad Ragaz, Switzerland) [25].…”
Section: Methodsmentioning
confidence: 99%
“…The NiAl 2 O 4 powder was then ball-milled for an additional 100 h. The NiAl 2 O 4 target was prepared according to the same procedure as for the NiO target except that the sintering temperature was set to 1 400°C. NiO and NiAl 2 O 4 films were deposited on sapphire substrates using a radio frequency magnetron sputtering gun (SPG-001, Pascal Co., Ltd., Osaka, Japan) and the NiO and NiAl 2 O 4 targets at input powers of 40 and 60 W, respectively, in a vacuum chamber pumped to a base pressure of 3 × 10 − 5 Pa. 24,33,34) During the film deposition, argon gas (purity: 99.9999%) with a flow rate of 20 mL min − 1 was introduced into the chamber by a mass flow controller, and the gate value was positioned to maintain a chamber pressure of 1 Pa. The thickness of the films was monitored using a quartz crystal microbalance monitor (STM-2, INFICON Co. Ltd., Bad Ragaz, Switzerland).…”
Section: Methodsmentioning
confidence: 99%
“…180 The results were correlated with 129 I (r = 0.7) and 137 Cs (r = 0.8), with the 36 Cl released from the Fukushima accident calculated to be 1.4 ± 0.2 × 10 8 Bq based on the March 2011 129 I/ 36 Cl deposition ratio. Froehlich et al aimed to measure 210 Pb in 1 kg of NaI using AMS as part of a dark matter experiment. 181 The focus was on developing the optimal target material for high and stable negative ion output, based on Pb mixed with a Ag binder.…”
Section: Nuclear Materialsmentioning
confidence: 99%
“…Imashuku et al developed an optical emission spectrometry method for the on-line monitoring of copper–zinc thin films as they are formed. 210 The methodology was described in full in the paper and was aided by a schematic diagram of the instrumentation. The selection of appropriate emission wavelengths was undertaken with testing at numerous input powers, chamber pressures and target compositions.…”
Section: Inorganic Chemicals and Materialsmentioning
confidence: 99%