2021
DOI: 10.1002/ecj.12306
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Investigation of fabrication conditions for VO2 thin films by MOD using carbon thermal reduction

Abstract: Vanadium dioxide (VO2) thin films were fabricated by metal‐organic decomposition (MOD). To utilize a carbon thermal reduction for obtaining a VO2 composition, the precursor films were fabricated at the temperature Tp from 300°C to 380°C in a N2 atmosphere. From the measurement results of XRD, diffraction peaks indicating VO2 phase were observed with a wide range of firing temperatures from Tf = 560°C to 620°C. Furthermore, the peaks indicating VO2 phase were also observed with a wide range of firing time from … Show more

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“…35 In the presence of carbon, the metal oxides may be further reduced into metal elements (eqn (3) and (4)), depending on the reaction conditions where temperature plays a key role. 39 The direction and possibility of a chemical reaction can usually be estimated from the changes in Gibbs free energy (Δ x G θ m ), which can be calculated based on parameters including enthalpy change (Δ r H θ m ), entropy change (Δ r S θ m ), and reaction temperature (eqn (5)). According to the Δ x G θ m formula, the iron reduction reaction can only be triggered when the pyrolysis temperature is above 838.00 K (564.85 °C).…”
Section: Resultsmentioning
confidence: 99%
“…35 In the presence of carbon, the metal oxides may be further reduced into metal elements (eqn (3) and (4)), depending on the reaction conditions where temperature plays a key role. 39 The direction and possibility of a chemical reaction can usually be estimated from the changes in Gibbs free energy (Δ x G θ m ), which can be calculated based on parameters including enthalpy change (Δ r H θ m ), entropy change (Δ r S θ m ), and reaction temperature (eqn (5)). According to the Δ x G θ m formula, the iron reduction reaction can only be triggered when the pyrolysis temperature is above 838.00 K (564.85 °C).…”
Section: Resultsmentioning
confidence: 99%