Investigation of forming nanoclusters of germanium and silicon — germanium solid in LPCVD process

Kovalevsky, A. A.; Строгова, А. С.; Strogova, N. S.; Borisevich, V. M.

doi:10.1109/crmico.2014.6959608

2014 24th International Crimean Conference Microwave &Amp; Telecommunication Technology 2014

DOI: 10.1109/crmico.2014.6959608

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Investigation of forming nanoclusters of germanium and silicon — germanium solid in LPCVD process

A. A. Kovalevsky

А. С. Строгова

N. S. Strogova

et al.

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Investigation of forming nanoclusters of germanium and silicon — germanium solid in LPCVD process

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