2024
DOI: 10.1016/j.jmapro.2024.09.039
|View full text |Cite
|
Sign up to set email alerts
|

Investigation of grain growth and impurity diffusion in highly conductive copper interconnect films obtained by pulsed laser scanning annealing

Silin Han,
Zihan Zhou,
Peixin Chen
et al.
Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

0
0
0

Publication Types

Select...

Relationship

0
0

Authors

Journals

citations
Cited by 0 publications
references
References 38 publications
0
0
0
Order By: Relevance

No citations

Set email alert for when this publication receives citations?