1978
DOI: 10.1016/0022-0248(78)90169-0
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Investigation of growth processes of ingots of silicon carbide single crystals

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Cited by 550 publications
(249 citation statements)
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“…The high-temperature (2700 • C) seedless crystal growth is driven by the temperature gradients within the crucible, resulting in a pressure gradient and thus, in a mass transport. The process is followed by the subsequent fast cooling, which "freezes" the defects within the lattice at low densities (for details see [15]). Taking into account the retrograde character of the nitrogen solubility with temperature, the doping level of the 6H-SiC crystals is below 10 17 cm −3 and the compensation degree of nitrogen donors is ca.…”
mentioning
confidence: 99%
“…The high-temperature (2700 • C) seedless crystal growth is driven by the temperature gradients within the crucible, resulting in a pressure gradient and thus, in a mass transport. The process is followed by the subsequent fast cooling, which "freezes" the defects within the lattice at low densities (for details see [15]). Taking into account the retrograde character of the nitrogen solubility with temperature, the doping level of the 6H-SiC crystals is below 10 17 cm −3 and the compensation degree of nitrogen donors is ca.…”
mentioning
confidence: 99%
“…carbon-based electron ic components, including the methods of growing 3D silicon carbide mono-crystals (the LETI method) [1], epitaxial diamond structures with unprecedented electrophysical parameters [2], 3D nanoscale topologically-ordered silicon carbide -nanostructured diamond compositions used in auto-emission electronics [3,4], 2D nanolayer compositions of rigid-chain polyimides used for interlayer insu lat ion w ith nano-porous low-k dielectrics in the state-ofthe-art integrated microcircuits having nanosca le topolog ica l parameters [5,6].…”
Section: #3 / 65 / 2016mentioning
confidence: 99%
“…Особо следует отметить достижения ряда научно-образовательных коллек-тивов, функционирующих на базе вуза, по крити-ческим направлениям развития углеродных мате-риалов и ЭКБ на их основе, включая технологии роста объемных монокристаллов карбида кремния (метод ЛЭТИ) [1], эпитаксиальных структур алмаза с ранее недостижимыми электрофизическими пара-метрами [2], 3D наноразмерных топологически упо-рядоченных композиций "карбид кремния -нано-структурированный алмаз" для автоэмиссионной электроники [3,4], нанослоевых 2D-композиций жесткоцепных полиимидов для межслойной изо-ляции нанопористыми low-k-диэлектриками в новейших интегральных микросхемах с нанораз-мерными топологическими нормами [5,6].…”
unclassified
“…Synthetic SiC wafers were grown at Linkoping University using the sublimation method [16] at a temperature of circa 2400 °C; temperature gradients over the 2 in wafer diameter did not exceeded 10-20°. During the growth process some instabilities have occurred, leading to the development of macroscopic (few mm 2 ) domains of different polytype compositions and/or different concentrations of charge carriers.…”
Section: Samplesmentioning
confidence: 99%