2013
DOI: 10.1016/j.apsusc.2012.10.168
|View full text |Cite
|
Sign up to set email alerts
|

Investigation of humidity-dependent nanotribology behaviors of Si(1 0 0)/SiO2 pair moving from stick to slip

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

3
29
0

Year Published

2014
2014
2024
2024

Publication Types

Select...
7
1

Relationship

1
7

Authors

Journals

citations
Cited by 39 publications
(32 citation statements)
references
References 36 publications
3
29
0
Order By: Relevance
“…Two aspects of these results are somewhat surprising: (i) Etched Si surfaces show a significantly increased friction coefficient compared to the as received Si surface and (ii) L adh does not agree with the measured AFM based adhesion forces, see Table 3. However, the resulting friction coefficient of the as received Si(100) wafer in contact with the spherical probe of 0.23 ± 0.05 is in good agreement with the work of Yu et al [12], who probed the transition from stick to slip for the contact of micron-sized silica spheres on a Si(100) wafer depending on the relative humidity, as well as findings by Zhang et al [21], who studied the sliding friction of silica colloidal probes on microsphere-patterned silicon surfaces. Further agreement is found with reports by Maharaj et al [22] and Quintanilla et al [23].…”
Section: Correlation Between Lateral Forces During Sliding and Surfacsupporting
confidence: 81%
See 2 more Smart Citations
“…Two aspects of these results are somewhat surprising: (i) Etched Si surfaces show a significantly increased friction coefficient compared to the as received Si surface and (ii) L adh does not agree with the measured AFM based adhesion forces, see Table 3. However, the resulting friction coefficient of the as received Si(100) wafer in contact with the spherical probe of 0.23 ± 0.05 is in good agreement with the work of Yu et al [12], who probed the transition from stick to slip for the contact of micron-sized silica spheres on a Si(100) wafer depending on the relative humidity, as well as findings by Zhang et al [21], who studied the sliding friction of silica colloidal probes on microsphere-patterned silicon surfaces. Further agreement is found with reports by Maharaj et al [22] and Quintanilla et al [23].…”
Section: Correlation Between Lateral Forces During Sliding and Surfacsupporting
confidence: 81%
“…[12], the sliding experiments on the Si surface etched at 1,600 W were repeated under a dry (2.4% RH) nitrogen atmosphere. The comparison between the previous results and the once under dry condition are shown in Fig.…”
Section: Evolution Of Lateral Forces Of a Multi-cycle Friction Loop Smentioning
confidence: 99%
See 1 more Smart Citation
“…When the contact pair is chemically inert (such as diamond tip), the mechanical wear of silicon surface usually occurs under high contact pressure [11,12]. However, when the contact pair is chemically reactive (such as Si or SiO 2 tip), serious tribochemical wear of silicon may occur in humid air under a contact pressure far below its yield stress (7 GPa) [13][14][15]. Such tribochemical wear was also observed in silicon-based MEMS devices [7][8][9][10].…”
Section: Introductionmentioning
confidence: 95%
“…The AFM tips can be used to simulate a single asperity contact and can provide a very light normal load at micro-Newton scale during friction, which is a necessary condition for the ductile material removal at nanoscale [9][10][11][12]. Through contact, the AFM tip can perform single-pass line scanning and multi-pass line scanning.…”
Section: Introductionmentioning
confidence: 99%