2015
DOI: 10.1587/elex.12.20150098
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Investigation of in-situ doping profile for N+/P/N+ bidirectional switching device using Si<sub>1−x</sub>Ge<sub>x</sub>/Si/Si<sub>1−x</sub>Ge<sub>x</sub> structure

Abstract: We present a novel junction device with bidirectional current flow for switching devices in a high density spin torque transfer magnetic random access memory (STT-MRAM). In this structure, an N+ type strained SiGe material is adopted as a conduction layer to generate higher electron mobility and a flatter doping profile. A SiGe/Si/SiGe heterojunction structure is also used to obtain a better I on /I off ratio due to a steeper junction profile. It is confirmed by 3D simulation that this structure provides highe… Show more

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