Post-Transition Metals 2021
DOI: 10.5772/intechopen.93648
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Investigation of Indium Oxide Effect on Indium Particles Properties Used as Silicon Nanowires Catalyst

Abstract: In this chapter, we investigate on indium particles elaboration by different annealing processes: rapid thermal annealing (RTA) and conventional processes. The elaborated particles are dedicated to be used as catalyst for silicon nanowires' (SiNWs) growth by vapor-liquid-solid (VLS) process. The annealing parameters effect on indium particles properties is studied. After conventional annealing, the indium layer is cracked into elongated and inhomogeneous islands of micrometric sizes. XRD analysis depicts, in a… Show more

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