Investigation of Low-Pressure Glow Discharge in a Coaxial Gridded Hollow Cathode

Liang, Yonggan; Yuan, Chengxun; Gao, Ruilin; Jia, Jieshu; Kirsanov, G. V.; Bekasov, V. S.; Marin, Alexander; Kudryavtsev, A. A.; Eliseev, S. I.; Zhou, Zhongxiang

doi:10.1109/tps.2016.2602443

Cited by 15 publications

(10 citation statements)

References 29 publications

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“…The plasma generator is an ac discharge device [24][25][26][27] consisting of the vacuum chamber (shown in light blue), gas source (dark blue), a vacuum pump, and a portable ac power supply, as shown in figure 1. The cylindrical vacuum chamber, having a length of 38 cm and a diameter of 29 cm, features transparent windows on opposite sides, which are made of borosilicate glass.…”

Section: Methodsmentioning

confidence: 99%

Evidence of effective local control of a plasma’s nonlocal electron distribution function

Yuan

Yao

et al. 2020

Plasma Sources Sci. Technol.

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The presence and variation of a local magnetic field in a plasma volume can be used for local control of the parameters of plasma created by energetic electrons. The local magnetic field magnitude translates to the strength of the effective barrier against the penetration of energetic (and thermal) electrons (and ions) into certain regions where plasma generation can be modified. In those regions, the electron distribution function (EDF) may be local while, in the rest of the plasma, the EDF is typically nonlocal. The degree of this control is demonstrated to depend on the magnitude of the magnetic field.

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Section: Methodsmentioning

confidence: 99%

Evidence of effective local control of a plasma’s nonlocal electron distribution function

Yuan

Yao

et al. 2020

Plasma Sources Sci. Technol.

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“…The electric field distribution and plasma potential distribution in the discharge cavity can be obtained by solving the Poisson equation, which is expressed as [12]:…”

Section: Initial Electron Densitymentioning

confidence: 99%

“…Based on a two-dimensional fluid model, Jiang et al [11] studied the optimal hole size for the maximum plasma density in radio frequency (RF) HCD and obtained the optimal hole diameter that is approximately the sum of twice the thickness of the plasma sheath and triple the electronneutral mean free path in RF HCD. Liang et al [12] established a two-dimensional model of the discharge and obtained the spatial and radial distributions of the plasma potential, the electron density and the electron temperature, indicating that the plasma inside the hollow cathode cavity is similar to the negative glow of a DC glow discharge. Fu et al [13] showed that the parallel HCD can be manipulated into an integrated discharge with higher plasma density by monotonic control of the gas pressure based on a two-dimensional fluid model and two-dimensional electron density distribution by studying a five-layer tandem HCD.…”

Section: Introductionmentioning

confidence: 99%

Study of plasma characteristics of hollow cathode in glow discharge

Qiu,

Yu,

Zhou

et al. 2023

J. Phys. D: Appl. Phys.

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In order to further investigate the conditions and the coupling mechanisms for generating the hollow cathode effect for the process optimization in the field of surface modification, the plasma distribution and density in single glow and double glow hollow cathode discharge (HCD) were explored by experiments and simulations based on the two-dimensional fluid model. Additionally, we investigated the effects of the key parameters on the plasma density, the electron temperature and the potential field during the hollow cathode discharge. The experimental and simulation results showed that the high plasma density is owing to the hollow cathode effect (HCE) in the hollow cathode. It is found that there is a critical pore diameter for generating HCE, which is approximately the sum of the thickness of the plasma sheath and four times the electron-neutral mean free path in the single glow discharge while twice thickness of the plasma sheath and four times the electron-neutral mean free path in the double glow discharge. The hollow cathode effect in the double glow discharge can be observed when the ignition voltage that the source cathode voltage be 250 V greater than the workpiece cathode voltage can be met while the PD value is about 1.5~3.8 Torrmm. Consequently, we believe that our investigation on the plasma characteristics of hollow cathode in glow discharge will contribute to the development of the more optimal processing parameters for the application of the glow plasma discharge phenomena.

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“…Within that range of pl, the Dreicer criterion can be reached prior to gas breakdown with discharge voltage peaking from 10 4 V-10 5 V. In this case, if a grid anode is used with a sufficiently large area (drift space) behind it, then it is possible to recover a high current from the discharge in the form of an electron beam [5], [11]. There are a lot of research on the various configurations of grid anode glow discharge in recent decades, which have demonstrated the high efficiency of electron beam generation [5], [6], [7], [8], [10], [11], [12], [13].…”

Section: Introductionmentioning

confidence: 99%

Spectral Characteristics of DC Short Glow Discharge Plasma With Grid Electrodes

et al. 2023

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The characteristics of post-cathode plasma maintained by a self-made DC short glow-discharge plasma generator with grid electrodes were measured by optical emission spectroscopy. The discharge existed in an abnormal glow discharge mode at a voltage of 250-400 V and a helium pressure of 3-15 Torr and a discharge gap of 3 mm. The results indicate that the intensity distribution of helium atom spectral lines in the post-cathode space differs from that in the post-anode space. The temperature of electron excitation in the post-cathode plasma reaches its peak of 1500-3000K at 5-6 mm from the grid cathode. The difference in the intensity distributions of helium atom spectral lines in the post-cathode and post-anode spaces is associated with electron generation mechanism in these cases.INDEX TERMS Glow discharge, grid anode, spectral characteristics, post-anode plasma, effective thickness of plasma.

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Investigation of Low-Pressure Glow Discharge in a Coaxial Gridded Hollow Cathode

Cited by 15 publications

References 29 publications

Evidence of effective local control of a plasma’s nonlocal electron distribution function

Evidence of effective local control of a plasma’s nonlocal electron distribution function

Study of plasma characteristics of hollow cathode in glow discharge

Spectral Characteristics of DC Short Glow Discharge Plasma With Grid Electrodes

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