ASDAM 2000. Conference Proceedings. Third International EuroConference on Advanced Semiconductor Devices and Microsystems (Cat.
DOI: 10.1109/asdam.2000.889498
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Investigation of metal-induced low-temperature crystallization of SiO/sub 2/ sol-gel glass containing Ag

Abstract: The transition of the Ag-doped amorphous Si02 sol-gel made bulk samples into the crystalline a-crystobalite has been observed during the heat treatment at temperature of 500 "C, which is much lower than the values reported earlier. For that, silver has to be added to the starling solution in an amount such that it forms aggregates at the heat treatment. The other requirement to observe the metalinduced low-temperature crystallization is that the composition of the starting solution (namely, the water-to-TEOS r… Show more

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