2006 IEEE 4th World Conference on Photovoltaic Energy Conference 2006
DOI: 10.1109/wcpec.2006.279678
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Investigation of Modified Screen-Printing Al Pastes for Local Back Surface Field Formation

Abstract: This paper reports on a low-cost screen-printing process to form a self-aligned local back surface field (LBSF) through dielectric rear surface passivation. The process involved formation of local openings through a dielectric (SiNx or stacked SiO2/SiNx) prior to full area Al screenprinting and a rapid firing. Conventional Al paste with glass frit degraded the SiNx surface passivation quality because of glass frit induced pinholes and etching of SiNx layer, and led to very thin LBSF regions. The same process w… Show more

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Cited by 29 publications
(19 citation statements)
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“…This behavior was reported before [10] and can hardly be avoided. It can, however, be influenced by the size of the opening, because contacts larger than 200 !-1m reach a saturation of Si in AI in their middle part and there the AI remains in contact with the wafer.…”
Section: Sem Contact Area Investigationmentioning
confidence: 71%
“…This behavior was reported before [10] and can hardly be avoided. It can, however, be influenced by the size of the opening, because contacts larger than 200 !-1m reach a saturation of Si in AI in their middle part and there the AI remains in contact with the wafer.…”
Section: Sem Contact Area Investigationmentioning
confidence: 71%
“…For comparison, contact resistance was also measured for screen printed and fired aluminum contacting p -silicon. Reasonable specific contact resistance of 1.4 mΩ.cm 2 and 1.8 mΩ.cm 2 was measured with sputtered aluminum on n + and p + doped silicon respectively. Contact resistance for screen printed and fired aluminum was slightly higher at 2.9 mΩ.cm 2 .…”
Section: Methodsmentioning
confidence: 99%
“…This back surface printed aluminum (Al) has relatively high back surface recombination rates [1] and sub-optimal optical reflectivity [2] compared to dielectric with point contact and it prevents the more effective utilization of longer wavelength photons. An alternative solar cell process scheme such as point contact architecture offers potentially better back surface passivation and reflectivity compared to conventional crystalline silicon solar cells [3][4][5].…”
Section: Introductionmentioning
confidence: 99%
“…To avoid void formation due to a lack of Si during rapid cooling, there are several approaches. The addition of Si has already shown good results [8], [9]. In addition, the optimization of the contact spacing or firing with the Al paste on top was tested [10], [11].…”
Section: Introductionmentioning
confidence: 99%