2024
DOI: 10.1088/1361-6463/ad80a4
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Investigation of non-equilibrium phenomena in nitrogen RF inductively coupled plasma discharges: a state-to-state approach

Sanjeev Kumar,
Alessandro Munafò,
Sung Min Jo
et al.

Abstract: This work presents a vibrational and electronic (vibronic) state-to-state (StS) model for nitrogen plasmas implemented within a multi-physics modular computational framework to study non-equilibrium effects in inductively coupled plasma (ICP) discharges. The vibronic master equations are solved in a tightly coupled fashion with the flow governing equations eliminating the need for invoking any simplifying assumptions when computing the state of the plasma, leading to a high-fidelity physical modeling. The mode… Show more

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