2024
DOI: 10.1088/1361-6595/ad3f4a
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Investigation of O atom kinetics in O2 plasma and its afterglow

Matthias Albrechts,
Ivan Tsonev,
Annemie Bogaerts

Abstract: We have developed a comprehensive kinetic model to study the O atom kinetics in an O2 plasma and its afterglow. By adopting a pseudo-1D plug-flow formalism within the kinetic model, our aim is to assess how far the O atoms travel in the plasma afterglow, evaluating its potential as a source of O atoms for post-plasma gas conversion applications. Since we could not find experimental data for pure O2 plasma at atmospheric pressure, we first validated our model at low pressure (1-10 Torr) where very good experime… Show more

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