Investigation of optical properties of a-C:H films deposited from acetylene using direct ion beam deposition method

Grigonis, A.; Rutkūnienė, Živilė; Kopustinskas, V.; Babonas, G.-J.; Rėza, A.

doi:10.1016/j.vacuum.2005.01.092

Cited by 11 publications

(13 citation statements)

References 22 publications

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“…5). At low radiation density (2.4 MW/cm 2 ) the dielectric function ε(E) of thin DLC film was close to that for a-C [9]. At higher radiation density (4.8 MW/cm 2 ) the contribution of this DLC film was approximated by three Lorentzian lines and the spectra of effective ε(E) (Fig.…”

Section: Spectroscopic Ellipsometrymentioning

confidence: 52%

“…The details of deposition procedure were presented elsewhere [8]. The parameters of initial samples, i. e., non-irradiated a-C:H films on Si, were discussed in [9].…”

Section: Methodsmentioning

confidence: 99%

“…At laser intensities higher than 7 MW/cm 2 , Raman spectra were not typical of DLC films. The samples (B1P3) obtained at a relatively low hydrogen content (∼35%) are characterized [9] by a high percentage (≥ 70%) of sp 3 bonds in a-C:H films. The shape of Raman spectra for these samples was not significantly changed up to moderate (1.8-3.5 MW/cm 2 ) laser intensity.…”

Section: Methodsmentioning

confidence: 99%

“…The optical properties of untreated a-C:H films were investigated by reflectance [15] and ellipsometric [9] techniques. The optical response was usually interpreted in the model of the effective film.…”

Section: Spectroscopic Ellipsometrymentioning

confidence: 99%

“…This experimental observation can be explained by non-homogeneity of irradiated layered structure and the roughness of the interface between DLC and substrate. The spectral dependence of optical response for silica-coated irradiated samples was explained by the same model of the effective DLC film as for the samples without SiO 2 layer [9,15]. By solving the multilayer model using the transfer matrix technique [10], the dielectric function of the irradiated a-C:H films was determined (Fig.…”

Section: Spectroscopic Ellipsometrymentioning

confidence: 99%

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Modification of amorphous a-C:H films by laser irradiation

Grigonis¹

2007

Lithuanian J. Phys.

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Amorphous diamond-like hydrogenated carbon films a-C:H were formed on Si wafers by a direct ion beam deposition method from acetylene or a gas mixture of acetylene and hydrogen. The samples were irradiated in a scanning mode by second harmonic (wavelength λ = 532 nm) of a Q-switched YAG : Nd laser. The effect of laser irradiation was studied by Raman and infrared spectroscopy and spectroscopic ellipsometry. The changes in the optical spectra of the samples with different H amount were investigated in the dependence on laser intensity. Experimental data were interpreted taking into account the structural transformations of a-C:H films.

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Section: Spectroscopic Ellipsometrymentioning

confidence: 52%

“…The details of deposition procedure were presented elsewhere [8]. The parameters of initial samples, i. e., non-irradiated a-C:H films on Si, were discussed in [9].…”

Section: Methodsmentioning

confidence: 99%

Section: Methodsmentioning

confidence: 99%

Section: Spectroscopic Ellipsometrymentioning

confidence: 99%

Section: Spectroscopic Ellipsometrymentioning

confidence: 99%

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Modification of amorphous a-C:H films by laser irradiation

Grigonis¹

2007

Lithuanian J. Phys.

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Hydrogen-Containing Amorphous Carbon Layers as Optical Materials in the Near-IR Spectral Range

Hertwig

Krüger

Weise

et al. 2007

Plasma Process. Polym.

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Hydrogenated amorphous carbon layers were deposited on various substrates by means of a plasma CVD process with a RF substrate bias as well as an ECR plasma source. The optical properties of the a‐C:H layers were obtained via spectroscopic ellipsometry and correlated with their mechanical and chemical properties. The layers from pure RF plasma exhibit a higher absorption constant in the visible spectral range and a higher refractive index. All layers are nearly transparent in the NIR spectral range making them candidates for optical thin layer systems. The laser damage behaviour of the a‐C:H layers was investigated with ultrashort pulses. The damage thresholds were consistent with the absorption constants of the layers. Interesting damage morphologies were observed indicating a sensitivity of this experiment to sub‐structures in the layer.

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