2014 IEEE International Ultrasonics Symposium 2014
DOI: 10.1109/ultsym.2014.0645
|View full text |Cite
|
Sign up to set email alerts
|

Investigation of PDMS as coating on CMUTs for imaging

Abstract: Abstract-A protective layer is necessary for Capacitive Micromachined Ultrasonic Transducers (CMUTs) to be used for imaging purpose. The layer should both protect the device itself and the patient while maintaining the performance of the device. In this work Sylgard 170 PDMS is tested as coating material for CMUTs through comparison of transmit pressure and receive sensitivity in immersion of coated and uncoated elements. It is seen that the transmitted pressure decreases with 27% and the receive sensitivity d… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

0
9
0

Year Published

2016
2016
2024
2024

Publication Types

Select...
5
3
1

Relationship

5
4

Authors

Journals

citations
Cited by 14 publications
(9 citation statements)
references
References 6 publications
0
9
0
Order By: Relevance
“…This serves to electrically insulate the elements from the water. The encapsulation procedure is described in [13].…”
Section: B Acousticmentioning
confidence: 99%
“…This serves to electrically insulate the elements from the water. The encapsulation procedure is described in [13].…”
Section: B Acousticmentioning
confidence: 99%
“…The bump formed in the cavity of the CMUT by the double local oxidation has a radius comprising 2/3 of the cell plate. The center frequency in water immersion is 5 MHz and the pull-in voltage V pi is 220 V. The interconnect is identical to previous presented work [7] and the CMUT is coated with a ∼ 1 µm layer of polydimethylsiloxane (PDMS) for electrical insulation. The PDMS layer is flat and has no lens effect.…”
Section: Experimental Methodsmentioning
confidence: 99%
“…2 mm. The coating procedure is similar to the one described in [9]. Furthermore, during measurements a cylindrical PMMA holder pressing down on a rubber ring placed on top of the PCB serves as a water tank.…”
Section: Cmut Fabrication and Experimental Setupmentioning
confidence: 99%