Investigation of plasma parameters of a single-gas ion engine using a single langmuir probe

Abstract

This paper presents the results of an experimental study of the parameters of nitrogen, argon and helium plasma obtained in high-frequency capacitive ring discharge at a pressure of 35 Pa. The parameters were determined by a single Langmuir probe. Work is being carried out as part of a project to develop a backlash ion microwave plasma generator. The object of study is ionized gas formed in the ring capacitance gap of a microwave solid-state generator emitter on the MOSFET transistor MRF284. The power consumed by the microwave generator in the study is no more than 5 W. The work resulted in getting the volt-ampere characteristics of a high-frequency discharge in low-pressure gas and determining the main plasma parameters.