2020
DOI: 10.1149/ma2020-02221642mtgabs
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Investigation of Post-Bond Distortion in Direct Wafer Bonding

Abstract: As device sizes continue to shrink, accurate alignment in semiconductor wafer bonding process becomes more important. In the case of two patterned wafers directly bonded together, proper alignment of the electrical connections between the two bonding surfaces is critical. Misalignment between the wafers during bonding may lead to degraded electrical performance or even device failure. In the case of a patterned wafer directly bonded onto a blank carrier wafer, the relative displacement along the bonded interfa… Show more

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