2021
DOI: 10.1007/s10854-021-06581-3
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Investigation of Ru-doped Sb2Te alloy for high-speed and good thermal stability phase change memory applications

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Cited by 7 publications
(2 citation statements)
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“…In fact, the as-deposited RuSbTe film shows an amorphous phase, as demonstrated in the following section. Moreover, because Ru doping significantly enhances the thermal stability of amorphous Sb 2 Te, and GeTe 10 , 11 , a high T x is expected for amorphous RuSbTe. Based on this background, we aimed to develop a stoichiometric ternary RuSbTe material with high thermal stability and optical property modulation upon phase changes for photonic applications.…”
Section: Introductionmentioning
confidence: 99%
“…In fact, the as-deposited RuSbTe film shows an amorphous phase, as demonstrated in the following section. Moreover, because Ru doping significantly enhances the thermal stability of amorphous Sb 2 Te, and GeTe 10 , 11 , a high T x is expected for amorphous RuSbTe. Based on this background, we aimed to develop a stoichiometric ternary RuSbTe material with high thermal stability and optical property modulation upon phase changes for photonic applications.…”
Section: Introductionmentioning
confidence: 99%
“…For example, in Ru-doped Sb 2 Te-based PCM, the ten-year data-retention temperature reaches 143 • C, however, the SET speed is as slow as 6000 ps. [7] Interestingly, the laser pulse width as short as picosecond/femtosecond scale has been utilized to perform reversible phase transformation between amorphous and crystalline states. [8,9] The ultrashort laser pulse provides a powerful tool combining thermal processes and photon effects to achieve fast SET/RESET operation speed in PCM.…”
Section: Introductionmentioning
confidence: 99%