Investigation of silicon carbon oxynitride thin film deposited by RF magnetron sputtering

Aghaei, Abbas Ali; Eshaghi, Akbar; Ramazani, Mazaher; Zabolian, Hossein; Abbasi-Firouzjah, Marzieh

doi:10.1016/j.apsadv.2023.100546

Cited by 2 publications

(1 citation statement)

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“…These characteristic features of ZnO are the main reason why it is frequently preferred by researchers [22][23][24][25]. Many different methods can be used for the production of ZnO nanostructures, such as molecular beam epitaxy, metal organic chemical vapor deposition, chemical vapor deposition, physical vapor deposition, vapor-liquid-solid reaction, pulsed laser deposition, sputtering, spray pyrolysis and sol-gel processing [26][27][28][29][30][31][32][33]. Among these methods, the sol-gel method has higher popularity and industrial application than other existing methods due to its many advantageous aspects [34].…”

Section: Introductionmentioning

confidence: 99%

Improved humidity sensing performances of boron doped ZnO nanostructured thin films depending on boron concentration

Algün,

Alshater,

Akçay

2024

Phys. Scr.

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This study details the production and analysis of undoped zinc oxide (uZnO) and boron (B) doped zinc oxide nanostructured thin films, with a specific focus on assessing the influence of varying B doping concentrations on humidity sensing performance. The synthesis of undoped ZnO and B doped ZnO nanoparticles was carried out using sol-gel method. B doping concentrations within the ZnO lattice were adjusted to 1, 3, 4, 5, and 10 mol%. Subsequently, nanostructured thin films were obtained through the spin coating technique on glass substrates. X-ray diffraction analysis revealed a hexagonal wurtzite structure for all nanostructured thin films. Notably, a change in preferential orientation from the (002) plane to the (100) plane occurred when B doping concentration exceeded 5 mol%. Scanning electron microscopy showcased nano-sized grains and capillary nanopores on the surface of each thin film. Energy dispersive X-ray spectra confirmed the presence of zinc, oxygen, and boron elements in the nanostructured thin films. Humidity sensing performance was assessed through electrical resistance measurements in the range of 45–90% relative humidity at room temperature. All fabricated sensors exhibited sensitivity to humidity. Remarkably, the sensor with a 5 mol% B doping concentration demonstrated the highest humidity sensitivity (438.44 times) and the fastest response (2.0 s) and recovery times (14.2 s). The study concluded that the optimal B doping concentration for designing a highly efficient humidity sensor was determined to be 5 mol%. Overall, the study underscores the potential of B doped ZnO nanostructures for humidity sensor applications, given their exceptional sensor performance.

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