Investigation of small-fraction molecular impurities in high-pressure helium plasmas using optical plasma diagnostic methods
Keiichiro Urabe,
Minami Toyoda,
Yoshinori Matsuoka
et al.
Abstract:In high-pressure plasmas using gases diluted via a rare gas, small-fraction impurities in the discharge space significantly impact the basic plasma parameters and excited-species generation processes. This study investigated the behaviors of molecular impurities in a dielectric barrier discharge (DBD) generated in a flow of high-purity He gas using optical plasma diagnostics methods. The optical emission spectra obtained under various discharge conditions (pressure, flow rate, and voltage frequency) indicated … Show more
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