2014
DOI: 10.7567/jjap.53.058004
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Investigation of stability and charge state of Ne and Ar gas field ion source by time-of-flight mass spectrometry

Abstract: Charge state distribution of the working gases of the Ar and Ne gas field ion source (GFIS) were investigated by the time-of-flight mass spectrometry using a newly designed experimental system. GIFS emitters having few atoms on the top of the (111) surface of tungsten were formed by a remolding and field evaporation sequence with electrochemically etched h111i oriented tip. At a probe current of about 1 pA, the ratio of standard deviation of fluctuation and average ion current <2.5% was recorded from a single … Show more

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Cited by 15 publications
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