2022
DOI: 10.1080/03772063.2022.2071770
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Investigation of Step Fin (SF), Step Drain (SD) and Step Source (SS) FinFETs with Trap Effect

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“…This random variation is due to the dependence of the metal-work function (WF) on the crystal orientation of the metal grain, which is very difficult to control during fabrication [6,7]. The presence of ITCs increased the thermal density, which affects the Self-heating and deteriorates the device performance and device's reliability at stake [8][9][10]. Channel engineering is one of the ways to mitigate SCEs, and dual material gate (DMG) technology further suppresses SCEs without affecting the device behavior [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…This random variation is due to the dependence of the metal-work function (WF) on the crystal orientation of the metal grain, which is very difficult to control during fabrication [6,7]. The presence of ITCs increased the thermal density, which affects the Self-heating and deteriorates the device performance and device's reliability at stake [8][9][10]. Channel engineering is one of the ways to mitigate SCEs, and dual material gate (DMG) technology further suppresses SCEs without affecting the device behavior [11,12].…”
Section: Introductionmentioning
confidence: 99%