2008
DOI: 10.1016/j.susc.2008.08.010
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Investigation of submonolayer SiOX species formed from oxidation of silane on Pt(111)

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Cited by 9 publications
(17 citation statements)
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“…The present DFT study is partly motivated by previous experimental studies of this chemistry, in which the formation of oxidized silicon species on the surface was evident [7][8][9][10]. Although surface intermediates formed during the oxidation were tracked with high resolution electron energy loss spectroscopy (HREELS), identification of the intermediates was difficult because of the absence of previously studied analogues.…”
Section: Introductionmentioning
confidence: 99%
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“…The present DFT study is partly motivated by previous experimental studies of this chemistry, in which the formation of oxidized silicon species on the surface was evident [7][8][9][10]. Although surface intermediates formed during the oxidation were tracked with high resolution electron energy loss spectroscopy (HREELS), identification of the intermediates was difficult because of the absence of previously studied analogues.…”
Section: Introductionmentioning
confidence: 99%
“…We have previously conducted experimental studies of the thermal chemistry of submonolayer coverages of Si and O on Pd(1 1 1) and Pt(1 1 1) under ultrahigh vacuum (UHV) conditions [9,10]. On Pd(1 1 1) oxidation of surface Si to an intermediate oxidation state was observed at low temperatures.…”
Section: Introductionmentioning
confidence: 99%
“…The most striking result of these experiments was the discovery of Si-O stripe structure. This result was confirmed by vibrational spectra measurements [2] and supported by density functional theory (DFT) calculations [3]. According to the DFT results, at low silicon coverage the SiO complex (Si atom with O atom in an "on-top" position) is initially formed.…”
Section: Introductionmentioning
confidence: 63%
“…Silane decomposition is modelled by random Si and H 2 deposition on the lattice initially populated by oxygen atoms. We maintained the experimental conditions [2] assuming that all constituents, Si, O, and H 2 , diffuse over fcc sites of the hexagonal lattice, and O and Si coverages (population of fcc sites) are c O = 0.25 and c Si = 0.1-0.25. Though hydrogen is also mostly located at fcc sites, it often occupies other positions and even dissolutes to subsurface [9,10].…”
Section: Modelmentioning
confidence: 99%
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