Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si

Zhang, Hanqiang; Wang, Hongliang

doi:10.3390/mi12111286

Cited by 21 publications

(13 citation statements)

References 27 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…It can be seen that most of the vibration energy during Rayleigh wave propagation on the substrate was within one wavelength, which can also prove the reasonableness of the modeling. This is consistent with the research in reference [ 22 ].…”

Section: Theory and Simulationsupporting

confidence: 94%

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

Liu,

Wang,

Zhang

et al. 2023

Sensors

Self Cite

View full text Add to dashboard Cite

Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.

show abstract

Section: Theory and Simulationsupporting

confidence: 94%

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

Liu,

Wang,

Zhang

et al. 2023

Sensors

Self Cite

View full text Add to dashboard Cite

show abstract

“…From all the studied types of acoustic waves, Sezawa SAW has high acoustic velocity and a large electromechanical coupling coefficient that make it useful for elucidating the bio-sensing properties [ 41 ]. It has the highest resonant frequency of up to 17.7 GHz and a signal amplitude of 20 dB with an electromechanical coefficient equal to 0.92% [ 42 ]. These devices have shown promising characteristics in many applications due to their compact structures, low power consumption, easy construction and simple packaging, high sensitivity, and fast response that can be used for diverse applications such as sensing ultraviolet radiation, gas, humidity, pH, and biomolecules.…”

Section: Operating Principles Of Various Acoustic Sensor Typesmentioning

confidence: 99%

The Recent Development of Acoustic Sensors as Effective Chemical Detecting Tools for Biological Cells and Their Bioactivities

et al. 2023

View full text Add to dashboard Cite

One of the most significant developed technologies is the use of acoustic waves to determine the chemical structures of biological tissues and their bioactivities. In addition, the use of new acoustic techniques for in vivo visualizing and imaging of animal and plant cellular chemical compositions could significantly help pave the way toward advanced analytical technologies. For instance, acoustic wave sensors (AWSs) based on quartz crystal microbalance (QCM) were used to identify the aromas of fermenting tea such as linalool, geraniol, and trans-2-hexenal. Therefore, this review focuses on the use of advanced acoustic technologies for tracking the composition changes in plant and animal tissues. In addition, a few key configurations of the AWS sensors and their different wave pattern applications in biomedical and microfluidic media progress are discussed.

show abstract

“…Relevant studies have shown that ZnO piezoelectric films have a high degree of orientation in any substrate deposition, which is because ZnO crystals will always grow in the direction of the lowest free energy at the surface, and thus, ZnO piezoelectric films have better consistency [14][15][16]. Among various substrates, diamond substrates have extremely high sound velocity, which is conducive to the production of high-frequency SAW devices [17]. In addition, the thermal conductivity of a diamond is very high; thus, it can effectively transfer and disperse heat, thereby improving the power tolerance of SAW devices.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the Effects of Parameters on the Performance of Resonators Based on a ZnO/SiO2/Diamond Structure

Cao,

Wang,

Zhang

2024

Applied Sciences

Self Cite

View full text Add to dashboard Cite

With the development of communications technology, surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices have become hotspots of the competitive research in the frequency band above GHz. It imposes higher requirements on the operating frequency, temperature coefficient of frequency (TCF), and electromechanical coupling coefficient (k2) of SAW devices. In this work, we reported on a novel ZnO/SiO2/diamond-layered resonator structure and systematically investigated its propagation characteristics by using finite element methods. A comparative study and analysis of k2 and acoustic velocity (vp) for both the excited Rayleigh mode and the Sezawa mode were conducted. By selecting the appropriate ZnO piezoelectric film, SiO2, and electrode thickness, the Sezawa mode was chosen as the main mode, effectively improving both k2 and vp. It was observed that the k2 of the Sezawa mode is 7.5 times that of the excited Rayleigh mode and nearly 5 times that of piezoelectric single-crystal ZnO; vp is 1.7 times that of the excited Rayleigh mode and nearly 1.5 times that of piezoelectric single-crystal ZnO. Furthermore, the proposed multilayer structure achieves a TCF close to 0 while maintaining a substantial k2. In practical applications, increasing the thickness of SiO2 can compensate for the device’s TCF reduction caused by the interdigital transducer (IDT). Finally, this study explored the impact of increasing the aperture width and IDT pairs on the performance of the single-port resonator, revealing the changing patterns of quality factor (Q) values. The results reported here show that the structure has great promise for the fabrication of high-frequency and low-TCF SAW devices.

show abstract

Investigation of Surface Acoustic Wave Propagation Characteristics in New Multilayer Structure: SiO2/IDT/LiNbO3/Diamond/Si

Cited by 21 publications

References 27 publications

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure

The Recent Development of Acoustic Sensors as Effective Chemical Detecting Tools for Biological Cells and Their Bioactivities

Analysis of the Effects of Parameters on the Performance of Resonators Based on a ZnO/SiO2/Diamond Structure

Contact Info

Product

Resources

About