2018
DOI: 10.1063/1.5020983
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Investigation of surface boundary conditions for continuum modeling of RF plasmas

Abstract: This work was motivated by a lacking general consensus in the exact form of the boundary conditions (BCs) required on the solid surfaces for the continuum mod-

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Cited by 7 publications
(2 citation statements)
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“…Details of the numerical methods used for the plasma simulation were provided in a previous work 42 with a summary here. The time derivatives in the plasma equations use a second order scheme and the equations are iterated until the system is solved simultaneously.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Details of the numerical methods used for the plasma simulation were provided in a previous work 42 with a summary here. The time derivatives in the plasma equations use a second order scheme and the equations are iterated until the system is solved simultaneously.…”
Section: Methodsmentioning
confidence: 99%
“…The plasma model, which was presented in detail and validated previously 42 , is based on a continuum description using a second-order local mean energy approximation 43 . In this model, the equations governing the electron number density n e , ion number density n i , and electron energy density ω e are:…”
Section: Governing Equations a Plasma Equationsmentioning
confidence: 99%