Investigation of the Al-Mo-B(CN) coatings deposited using magnetron sputtering of Al-Mo-B4C target produced by deto-nation spray coating

Abstract

In this work, Al-Mo-B(CN) thin coatings were deposited by magnetron sputtering using composite metal-ceramic Al-Mo-B4C target. A metal-ceramic composite target for magnetron sputtering was fabricated by a robotic complex for detonation spraying of coatings equipped with a multi-chamber detonation accelerator. The powder composition (30Mo-30Al-40B4C) was sprayed onto the copper plate base of the composite target-cathode. The obtained cathode target with Al-Mo-B4C coating (thickness 280-300 μm) was used to deposit the Al-Mo-B(CN) coating (DC mode) on flat specimens of AISI 316 steels and silicon using equipment for magnetron sputtering UNICOAT 200. The Al-Mo-B4C coating has a lamella-type structure with inclusions of boron car-bide particles the elemental composition is evenly distributed in the material. The structure and morphology of coatings were studied using methods of optical, scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray analysis (XRD), and X-ray photoelectron spectros-copy (XPS). Mechanical and tribological properties of the Al-Mo-B(CN) thin coatings were determined using methods of nanoindentation, scratch testing, and tribological testing under fluid-free friction regime at room temperature. The Al-Mo-B(CN) coating (thickness ~ 1 μm) exhibited a dense uniform fine-grained structure with no columnar elements and were well-adherent to the substrates after deposition. Al-Mo-B(CN) coating has a amorphous structure. XPS analysis confirmed the formation of the MoB2 and AlN phase with an admixture of oxygen in the form of aluminum oxide, molybdenum oxide and boron oxide. Al-Mo-B(CN) coating possess hardness of 13 GPa, elasticity modulus of 114 GPa, elastic recovery of 45%, and friction coefficient of 0.8 against steel 100 Cr6 ball. The failure mode occurring in the tested coatings was fatigue and abrasive. The adhesion strength of Al-Mo-B(CN) coating amounted to about 11 N, and the failure mode was cohesive associated with plastic deformation and formation of fatigue cracks in the coating material.