Based on the [2-(2-nitrophenyl)propoxy]carbonyl (nppoc) group, six new photolabile protecting groups (2, 8, 9b, 16b, 25b, and 26), each covalently linked to a 9H-thioxanthen-9-one (Tx) unit functioning as an intramolecular triplet sensitizer, were synthesized. Linkers were introduced between the Me group or the aromatic ring of nppoc and the 2-position of Tx by means of classical organic synthesis combined with Pd catalyzed CÀC coupling reactions. The new photolabile protecting groups to be used in light-directed synthesis of DNA chips were attached to the 5'-O-atom of thymidine via a carbonate linkage, giving rise to the caged nucleosides 7, 11, 13, 19, 20, and 30. Introduction. ± Light-directed, massive parallel combinatorial synthesis with photoremovable protecting groups allows the fabrication of high-density DNA chips [1] [2], i.e., arrays of up to 1 million spots of different oligonucleotides on an area of ca. 1 cm 2 . Such high-density DNA chips represent highly effective diagnostic tools for a variety of genomic applications such as genotyping [3], gene-expression profiling [4], and sequencing by hybridization [5]. Several reviews on DNA chips and their application have been published [6 ± 12].The efficiency of the photolithographic technique for producing high-density DNA chips critically depends on the performance, i.e., the light sensitivity and the uniformity of the photochemical cleavage reaction of the photolabile protecting groups blocking either the terminal 5'-OH or the 3'-OH group in the growing oligonucleotides. Among the photolabile protecting groups currently in use for photolithographic DNA-chip synthesis [13], the [2-(2-nitrophenyl)propoxy]carbonyl (nppoc) group (1) developed by Pfleiderer and co-workers is a prominent example [14] [15]. It reacts in excellent yield and gives rise to a good quantum yield, the only draw-back for a higher light sensitivity being its low absorption coefficient in the near UV, where illumination is usually performed with the 366-nm Hg line. It has been shown that this problem can be overcome by triplet sensitization, e.g., with 9H-thioxanthen-9-one ( thioxanthone ), which has a high absorption coefficient at 366 nm and, on diffusional encounters, transfers its triplet energy to the photoreactive nitrobenzyl chromophore [16]. In O 2 -free solution, the rate of photodeprotection of nppoc-protected thymidine is enhanced by a factor of ca. ten, when thioxanthone is added as a sensitizer. However, since intermolecular energy transfer is rate-limited by diffusion, in the presence of O 2 , the sensitizer is mostly quenched, and the enhancement of the photoreactivity is only weak or even absent. To avoid the diffusional step in energy transfer, we synthesized new