Investigation of the influence of constant pressure oil source fluctuations on ultra-precision machining

Proceedings of the Institution of Mechanical Engineers, Part B:

Yang³

et al. 2015

Self Cite

Relative vibration between the cutting tool and the workpiece plays an important role in the surface generation in ultraprecision diamond machining. High-frequency vibration of the cutting tool has important influence on the surface roughness error, while the low-frequency vibration of machine tool structure affects the figure error. The previous related researches mainly focus on the first-mode frequency vibration of the machine tool. However, its multimode frequency vibration is rarely discussed. In this article, the multimode frequency vibration of the machine tool and its influences on the surface generation in flycutting are studied. The experimental results have been found to agree well with the simulation results.

Section: Resultsmentioning

confidence: 99%

An experimental and theoretical investigation into multimode machine tool vibration with surface generation in flycutting

Proceedings of the Institution of Mechanical Engineers, Part B:

Yang³

et al. 2015

Self Cite

“…Chen et al. 17 found some waviness errors on the finished surface of the KDP crystal. The amplitude of these waviness errors is about 10 nm, the wavelengths are gathered in the range of 0.5–1.…”

Section: Introductionmentioning

confidence: 99%

“…They pointed out that this kind of profile will reduce the laser-induced damage threshold (LIDT) of KDP optical elements. Chen et al 17 found some waviness errors on the finished surface of the KDP crystal. The amplitude of these waviness errors is about 10 nm, the wavelengths are gathered in the range of 0.5-1.…”

Section: Introductionmentioning

confidence: 99%

Influence of air-induced vibration of aerostatic bearing on the machined surface quality in ultra-precision flycutting

Gao

Proceedings of the Institution of Mechanical Engineers, Part J:

et al. 2017

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The performance of potassium dihydrogen phosphate optics in inertial confinement fusion devices is highly affected by its surface topography. This paper theoretically investigates the relationship between the air-induced vibration of aerostatic bearing and high-frequency ripples (amplitudes of around 12 nm, spatial periods in the range of 8–30 mm) on machined surface of potassium dihydrogen phosphate optics. A simulation model, which combines transient computational fluid dynamic analysis and transient dynamic analysis, is proposed to simulate the vibration of tool tip. The three-dimensional flow status of air film is studied based on large eddy simulation method, and air vortex shedding phenomenon is observed, which results in the dynamical change of air film force. The simulated vibration amplitudes of tool tip is 8 nm, and its spatial periods are in the range of 10–24 mm, which agree well with the measured data.

“…In a previous research, some mid-frequency errors are found along the feeding direction. 19 The amplitude of these waviness errors is about 10 nm, and the wavelengths are gathered in the range of 0.5-1.5 mm. These errors are induced by the oil source pressure fluctuation of hydraulic system.…”

Section: Introductionmentioning

confidence: 99%

The influence of oil source pressure fluctuation on the waviness error of potassium dihydrogen phosphate in ultra-precision machining

Gao

Proceedings of the Institution of Mechanical Engineers, Part B:

et al. 2017

Self Cite

The performance of potassium dihydrogen phosphate optical components is very sensitive to the waviness error. The time-varying oil source pressure leads to dynamic change in the eccentricity of hydrostatic slide; waviness errors can be induced on the finished surface of potassium dihydrogen phosphate consequently. The relationship between unsteady oil source pressure and the waviness errors of potassium dihydrogen phosphate is studied in this article. A mathematical model is built to calculate the displacement of hydrostatic slide induced by unsteady oil supply pressure. Moreover, a comprehensive fluid–structure interaction model is built to consider the influence of structural deformation of slide on the pressure distribution of oil film. Experiments are carried out to verify the proposed model. The calculated results agree well with the experimental results, and it is found that the calculated results show better accuracy when fluid–structure interaction is considered, which validates the reliability of this model.