Investigation of the Interface Stability of the Metal/HfO&lt;sub&gt;2&lt;/sub&gt;/AlN/InGaAs MOS Devices

Binh, H.; Ha, Minh Thien Huu; Huynh, Sa Hoang; Nguyen, Trung Anh; Lin, J.; Yang, Kesong; Chiang, Chiu-Chih; Jin, Yang; Lin, Yu Chiao; Chang, En-Chih

doi:10.7567/ssdm.2017.ps-6-05

Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials 2017

DOI: 10.7567/ssdm.2017.ps-6-05

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Investigation of the Interface Stability of the Metal/HfO<sub>2</sub>/AlN/InGaAs MOS Devices

H. Binh¹,

Minh Thien Huu Ha²,

Sa Hoang Huynh³

et al.

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Investigation of the Interface Stability of the Metal/HfO<sub>2</sub>/AlN/InGaAs MOS Devices

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