2022 IEEE 34th International Symposium on Power Semiconductor Devices and ICs (ISPSD) 2022
DOI: 10.1109/ispsd49238.2022.9813534
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Investigation of the Short-circuit Failure Mechanisms in 1.2-kV SiC Trench MOSFETs with Thin N+ Substrates Using Electro-thermal-mechanical Analysis

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